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• 18:08, 30 July 2025 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Depositionof NbTi in Sputter-System Metal-Nitride PC3/ (Created page with "<i>This page is written by <b>Evgeniy Shkondin @DTU Nanolab</b> if nothing else is stated. <br> All images and photos on this page belongs to <b>DTU Nanolab</b>.<br> The fabrication and characterization described below were conducted in <b>2025 by Rawa Tanta</b> and <b>Evgeniy Shkondin, DTU Nanolab</b>.<br></i> This page presents the results of NbTi deposition using DC sputtering in Sputter-System Metal-Nitride(PC3), now commonly known as "Cluster Lesker". The depositi...")
• 17:59, 30 July 2025 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Depositionof NbTi (Created page with "==Comparison of LPCVD, PECVD, and sputter systems for silicon nitride deposition== {|border="1" cellspacing="1" cellpadding="3" style="text-align:left;" |- |- |-style="background:silver; color:black" ! !Sputter-System Metal-Nitride(PC3) !Lesker sputter system |- |- |-style="background:White...")
• 17:52, 30 July 2025 Eves talk contribs created page File:Eves NbTiN XRR rawta ft may 2025.png (File uploaded with MsUpload)
• 17:52, 30 July 2025 Eves talk contribs uploaded File:Eves NbTiN XRR rawta ft may 2025.png (File uploaded with MsUpload)
• 17:52, 30 July 2025 Eves talk contribs created page File:Eves NbTiN GiXRD rawta ft may 2025.png (File uploaded with MsUpload)
• 17:52, 30 July 2025 Eves talk contribs uploaded File:Eves NbTiN GiXRD rawta ft may 2025.png (File uploaded with MsUpload)
• 14:40, 30 July 2025 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of Tantalum/Sputtering of Ta in Sputter-System Metal-Nitride-PC3/Ta PC3 Src3 DC test 2022 (Created page with "<i>This page is written by <b>Evgeniy Shkondin @DTU Nanolab</b> if nothing else is stated. <br> All images and photos on this page belongs to <b>DTU Nanolab</b>.<br> The fabrication and characterization described below were conducted in <b>2022 by Evgeniy Shkondin, DTU Nanolab</b>.<br></i> <b>Important Note!</b> The deposition was carried out in 2022 with a weakened magnetron! This explains the high DC bias voltages. The magnetron was changed to an HSM type in 2024. For...")
• 14:40, 30 July 2025 Eves talk contribs created page File:Eves XRR Ta DC 200C 2022 20250720.png (File uploaded with MsUpload)
• 14:40, 30 July 2025 Eves talk contribs uploaded File:Eves XRR Ta DC 200C 2022 20250720.png (File uploaded with MsUpload)
• 14:40, 30 July 2025 Eves talk contribs created page File:Eves XRR Ta DC RT 2022 20250720.png (File uploaded with MsUpload)
• 14:40, 30 July 2025 Eves talk contribs uploaded File:Eves XRR Ta DC RT 2022 20250720.png (File uploaded with MsUpload)
• 14:40, 30 July 2025 Eves talk contribs created page File:Eves XRR Ta DC 600C 2022 20250720.png (File uploaded with MsUpload)
• 14:40, 30 July 2025 Eves talk contribs uploaded File:Eves XRR Ta DC 600C 2022 20250720.png (File uploaded with MsUpload)
• 14:40, 30 July 2025 Eves talk contribs created page File:Eves XRR Ta DC 500C 2022 20250720.png (File uploaded with MsUpload)
• 14:40, 30 July 2025 Eves talk contribs uploaded File:Eves XRR Ta DC 500C 2022 20250720.png (File uploaded with MsUpload)
• 14:40, 30 July 2025 Eves talk contribs created page File:Eves XRR Ta DC 400C 2022 20250720.png (File uploaded with MsUpload)
• 14:40, 30 July 2025 Eves talk contribs uploaded File:Eves XRR Ta DC 400C 2022 20250720.png (File uploaded with MsUpload)
• 14:40, 30 July 2025 Eves talk contribs created page File:Eves XRR Ta DC 300C 2022 20250720.png (File uploaded with MsUpload)
• 14:40, 30 July 2025 Eves talk contribs uploaded File:Eves XRR Ta DC 300C 2022 20250720.png (File uploaded with MsUpload)
• 14:40, 30 July 2025 Eves talk contribs created page File:Eves Ta DC T2T 2022.png (File uploaded with MsUpload)
• 14:40, 30 July 2025 Eves talk contribs uploaded File:Eves Ta DC T2T 2022.png (File uploaded with MsUpload)
• 14:40, 30 July 2025 Eves talk contribs created page File:Eves Ta DC GiXRD 2022.png (File uploaded with MsUpload)
• 14:40, 30 July 2025 Eves talk contribs uploaded File:Eves Ta DC GiXRD 2022.png (File uploaded with MsUpload)
• 14:35, 30 July 2025 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of Tantalum/Sputtering of Ta in Sputter-System Metal-Nitride-PC3 (Created page with "<i>This page is written by <b>Evgeniy Shkondin @DTU Nanolab</b> if nothing else is stated. <br> All images and photos on this page belongs to <b>DTU Nanolab</b>.<br> The fabrication and characterization described below were conducted in <b>2025 by Rawa Tanta</b> and <b>Evgeniy Shkondin, DTU Nanolab</b>.<br></i> =Ta DC Sputtering= This document presents the results of tantalum (<b>Ta</b>) deposition performed by DC sputtering in the <i>Metal-Nitride sputter system (PC3...")
• 14:35, 30 July 2025 Eves talk contribs created page File:Eves TaNTa 500C XRR rawta ft may 2025.png (File uploaded with MsUpload)
• 14:35, 30 July 2025 Eves talk contribs uploaded File:Eves TaNTa 500C XRR rawta ft may 2025.png (File uploaded with MsUpload)
• 14:35, 30 July 2025 Eves talk contribs created page File:Eves TaNTa 500C Wide Range RSM rawta ft may 2025.png (File uploaded with MsUpload)
• 14:35, 30 July 2025 Eves talk contribs uploaded File:Eves TaNTa 500C Wide Range RSM rawta ft may 2025.png (File uploaded with MsUpload)
• 14:35, 30 July 2025 Eves talk contribs created page File:Eves TaNTa 500C sample model rawta ft may 2025.png (File uploaded with MsUpload)
• 14:35, 30 July 2025 Eves talk contribs uploaded File:Eves TaNTa 500C sample model rawta ft may 2025.png (File uploaded with MsUpload)
• 14:35, 30 July 2025 Eves talk contribs created page File:Eves Ta temp comparison GiXRD rawta ft may 2025.png (File uploaded with MsUpload)
• 14:35, 30 July 2025 Eves talk contribs uploaded File:Eves Ta temp comparison GiXRD rawta ft may 2025.png (File uploaded with MsUpload)
• 14:35, 30 July 2025 Eves talk contribs created page File:Eves Ta subs comparison GiXRD rawta ft may 2025.png (File uploaded with MsUpload)
• 14:35, 30 July 2025 Eves talk contribs uploaded File:Eves Ta subs comparison GiXRD rawta ft may 2025.png (File uploaded with MsUpload)
• 14:35, 30 July 2025 Eves talk contribs created page File:Eves Ta RT XRR rawta ft may 2025.png (File uploaded with MsUpload)
• 14:35, 30 July 2025 Eves talk contribs uploaded File:Eves Ta RT XRR rawta ft may 2025.png (File uploaded with MsUpload)
• 14:35, 30 July 2025 Eves talk contribs created page File:Eves Ta RT GiXRD rawta ft may 2025.png (File uploaded with MsUpload)
• 14:35, 30 July 2025 Eves talk contribs uploaded File:Eves Ta RT GiXRD rawta ft may 2025.png (File uploaded with MsUpload)
• 14:35, 30 July 2025 Eves talk contribs created page File:Eves Ta 500C XRR rawta ft may 2025.png (File uploaded with MsUpload)
• 14:35, 30 July 2025 Eves talk contribs uploaded File:Eves Ta 500C XRR rawta ft may 2025.png (File uploaded with MsUpload)
• 14:35, 30 July 2025 Eves talk contribs created page File:Eves Ta 500C GiXRD rawta ft may 2025.png (File uploaded with MsUpload)
• 14:35, 30 July 2025 Eves talk contribs uploaded File:Eves Ta 500C GiXRD rawta ft may 2025.png (File uploaded with MsUpload)
• 16:45, 28 July 2025 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of Titanium Nitride/Deposition of Titanium Nitride using Sputter-System Metal-Nitride (PC3) (Created page with "<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>200px To be created")
• 13:55, 28 July 2025 Eves talk contribs created page Specific Process Knowledge/Characterization/XRD/Process Info/Pole Figure script (Created page with "<i> Unless otherwise stated, this page is written by <b>DTU Nanolab internal</b></i> function PoleFigureAngles(varargin) hs=varargin{1}; qs=varargin{2}; rotation=0; if length(varargin)>2 filename=varargin{3}; if length(varargin)==4 rotation=varargin{4}; end end if size(hs,1)==size(qs,1) for j=1:size(hs,1) % for each plane and substrate pair calculate the alpha and beta angles h=hs(j,:...")
• 19:16, 25 July 2025 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of Niobium Nitride/NbN Reactive Sputtering in Cluster Lesker PC3 (Created page with "<i>This page is written by <b>Evgeniy Shkondin @DTU Nanolab</b> if nothing else is stated. <br> All images and photos on this page belongs to <b>DTU Nanolab</b>.<br> The fabrication and characterization described below were conducted in <b>2025 by Evgeniy Shkondin, DTU Nanolab</b>.<br></i> The histogram experiment, where the DV bias voltage was measured as a function of N₂ flow for different Ar setpoints, was acquired together with <b>Sangeeth Kallatt</b> (san...")
• 19:16, 25 July 2025 Eves talk contribs created page File:Eves XRR NbN Ar10 N2 20 temp test 20250723.png (File uploaded with MsUpload)
• 19:16, 25 July 2025 Eves talk contribs uploaded File:Eves XRR NbN Ar10 N2 20 temp test 20250723.png (File uploaded with MsUpload)
• 19:16, 25 July 2025 Eves talk contribs created page File:Eves XRR NbN Ar20 N2 16 temp test 20250723.png (File uploaded with MsUpload)
• 19:16, 25 July 2025 Eves talk contribs uploaded File:Eves XRR NbN Ar20 N2 16 temp test 20250723.png (File uploaded with MsUpload)
• 19:16, 25 July 2025 Eves talk contribs created page File:Eves XPS survey NbN wafer9 700C 20250724.png (File uploaded with MsUpload)