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- 14:56, 16 May 2025 Mmat talk contribs uploaded File:Cross contamination multifilm.png
- 14:56, 16 May 2025 Mmat talk contribs created page File:Cross contamination misc.png
- 14:56, 16 May 2025 Mmat talk contribs uploaded File:Cross contamination misc.png
- 14:55, 16 May 2025 Mmat talk contribs created page File:Cross contamination film.png
- 14:55, 16 May 2025 Mmat talk contribs uploaded File:Cross contamination film.png
- 14:34, 16 May 2025 Mmat talk contribs uploaded a new version of File:Cross contamination location.png
- 12:09, 16 May 2025 Mmat talk contribs created page File:Cross contamination location.png
- 12:09, 16 May 2025 Mmat talk contribs uploaded File:Cross contamination location.png
- 11:57, 16 May 2025 Mmat talk contribs uploaded a new version of File:Cross contamination.png
- 11:43, 16 May 2025 Mmat talk contribs created page File:Cross contamination between.png
- 11:43, 16 May 2025 Mmat talk contribs uploaded File:Cross contamination between.png
- 11:43, 16 May 2025 Mmat talk contribs created page File:Cross contamination.png
- 11:43, 16 May 2025 Mmat talk contribs uploaded File:Cross contamination.png
- 11:10, 16 May 2025 Mmat talk contribs created page Specific Process Knowledge/Cross Contamination (Created page with "{{cc-nanolab}} '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Cross_Contamination click here]''' =<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>= ==Cross Contamination==")
- 08:43, 15 May 2025 User account Ampen talk contribs was created automatically
- 16:27, 14 May 2025 Mmat talk contribs created page LabAdviser/Courses/TPT Ebeam (Created page with "{{cc-nanolab}} '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/Courses/TPT_Ebeam click here]'''")
- 16:24, 14 May 2025 Mmat talk contribs created page Ebeam TPT (Created page with "{{cc-nanolab}} '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/Technology_Research click here]'''") Tag: Visual edit
- 15:27, 14 May 2025 Mmat talk contribs created page File:JehanDefine.png
- 15:27, 14 May 2025 Mmat talk contribs uploaded File:JehanDefine.png
- 11:51, 14 May 2025 Mmat talk contribs created page Specific Process Knowledge/Getting Started (Created page with " == Getting Started[edit | edit source] == As a new user to DTU Nanolab (and nano- and microfabrication), it might be difficult for you to find a good starting point on how to access our facility. This page is a guideline on how to start your process in our cleanroom. Not all points listed below might be relevant for you. You are always welcome to contact us at nanolabsupport@nanolab.dtu.dk, if you have any questions. # '''Register''' as user at www.nanolab.dtu.dk #* Re...") Tag: Visual edit
- 14:08, 12 May 2025 User account Majgoft talk contribs was created automatically
- 14:07, 8 May 2025 Mmat talk contribs created page LabAdviser/Safety (Description of how to get access to the different facilities at DTU Nanolab, including how to sign up for safety training, which online courses to take, how to request training.) Tag: Visual edit
- 13:42, 7 May 2025 Mmat talk contribs uploaded a new version of File:YouTube.JPG
- 14:55, 6 May 2025 Bghe talk contribs deleted page Specific Process Knowledge/Lithography/EBeamLithography/RaithElphyManual (content was: "'''Feedback to this page''': '''[mailto:e-beam@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Lithography click here]''' = <span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>200px = Purpose, location and technical specifications = '''OBSOLETE! This to...", and the only contributor was "Tigre" (talk))
- 10:23, 6 May 2025 Bghe talk contribs deleted page Specific Process Knowledge/Lithography/EBeamLithography/JEOL Processes (content before blanking was: "<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>200px =Large area circle arrays= Arrays of circles can naturally be exposed by exposing a pattern that consists of circles. In this scheme each circle will consist of a number of beam shots to fill the shape of each circle. For large areas this can however be very time consuming and pattern files can become very large. Hence, in this work we investigate a di...")
- 14:43, 5 May 2025 Bghe talk contribs deleted page Specific Process Knowledge/Lithography/ARP617 (content before blanking was: "Test of copolymer AR-P 617.05; a positive e-beam resist from AllResist. This copolymer is meant to be used as a sacrificial layer in a bi- or tri-layer e-beam resist stack (i.e. bottom layer). The copolymer adheres well on many substrates and can be dry-etched isotropically (to create under-cut) and anisotropically by reactive ion etch. Furthermore, it is softbaked at temperatures above 200 degrees and thus themally stable to many post-processing steps. This is...")
- 12:07, 5 May 2025 User account Frfed talk contribs was created automatically
- 08:53, 5 May 2025 Bghe talk contribs deleted page Specific Process Knowledge/Etch/Etching of Molybdæn (content was: "=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>200px= <code><nowiki>=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>200px=</nowiki></code> <!-- =<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>200px= --> ==Comp...", and the only contributor was "Mbec" (talk))
- 14:48, 2 May 2025 Bghe talk contribs deleted page Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/HfO2 etch (content was: "'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/IBE⁄IBSD_Ionfab_300/HfO2_etch click here]''' =<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>200px= =jklajakjg= ==jglasdjfg==", and the only contributor was "Shuya" (talk))
- 14:27, 2 May 2025 Bghe talk contribs deleted page Substrates/130 mm by 130 mm by 6.35 mm substrates (not existing)
- 13:55, 2 May 2025 Bghe talk contribs deleted page Specific Process Knowledge/Etch/DRIE-Pegasus/Pegsus-1 (content was: "'''WRONG ADDRESS - MUST BE DELETED!!!!!''' '''The user manual(s), quality control procedure(s) and results, user APV(s), technical information and contact information can be found in LabManager:''' Equipment info in [http://labmanager.nanolab.dtu.dk/function.php?module=Machine&view=view&mach=265| LabManager] == Process information == '''SPTS process notation''' Describing a proces...", and the only contributor was "Jmli" (talk))
- 13:51, 2 May 2025 Bghe talk contribs deleted page Specific Process Knowledge/Etch/DRIE-Pegasus 3/DREM0.5kWv2.3 (content was: "<!--Checked for updates on 4/4-2025 - ok/jmli -->", and the only contributor was "Jmli" (talk))
- 13:51, 2 May 2025 Bghe talk contribs deleted page LabAdviser/314/Microscopy 314-307/TEM/T20/Schematic (content before blanking was: "800px")
- 13:50, 2 May 2025 Bghe talk contribs deleted page LabAdviser/314/Microscopy 314-307/TEM/T20/Booking rules (content before blanking was: "'''Tecnai TEM Booking rules:''' '''1) Booking''' Each Tecnai user can book up to 2 SESSIONS in advance. This means that users can have only 2 SESSIONS booked for the future. It does not matter how far in the future the two sessions are booked. e.g. sessions can be booked for today & tomorrow, or today and Monday next week. Once you have 2 sessions booked, you can't book any more. As soon as you have finished one session, you can then book another. But you ca...")
- 13:50, 2 May 2025 Bghe talk contribs deleted page LabAdviser/CEN (content before blanking was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/LabAdviser/CEN click here]''' =This page gives an overview of the electron microscope equipment and other related resources connected to DTU Nanolab - building 307/314= ==SEM== *SEM Comparison page - all of DTU Nanolabs SEMs */Nova Nan...")
- 13:49, 2 May 2025 Bghe talk contribs deleted page LabAdviser/CEN/AFEG 250 Analytical ESEM (content before blanking was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=LabAdviser/CEN/Quanta_FEG_200_ESEM click here]''' <!-- Replace "http://labadviser.danchip.dtu.dk/..." wih the link to the Labadviser page--> The FEI AFEG 250 FEG is a field emission scanning electron microscope with a spatial resolution of 2 nm for the ETD detector in high vacuum at 30 keV. The microscope can o...")
- 09:52, 2 May 2025 Jehem talk contribs created page File:Aligner MLA 3.jpg
- 09:52, 2 May 2025 Jehem talk contribs uploaded File:Aligner MLA 3.jpg
- 09:52, 2 May 2025 Jehem talk contribs created page File:Aligner MLA 2.jpg
- 09:52, 2 May 2025 Jehem talk contribs uploaded File:Aligner MLA 2.jpg
- 12:54, 1 May 2025 User account S247196 talk contribs was created automatically
- 11:18, 1 May 2025 Bghe talk contribs created page Specific Process Knowledge/Preparation (Created page with "'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Preparation click here]''' =<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>200px=")
- 17:27, 28 April 2025 User account Laurih talk contribs was created automatically
- 17:11, 28 April 2025 Mmat talk contribs uploaded a new version of File:LabAdviser structure.jpg
- 15:48, 28 April 2025 Mmat talk contribs reverted File:FumehoodsOverview1.jpg to an old version (Reverted to version as of 15:42, 28 April 2025 (CEST))
- 15:47, 28 April 2025 Mmat talk contribs reverted File:FumehoodsOverview1.jpg to an old version (Reverted to version as of 10:28, 11 September 2024 (CEST))
- 15:42, 28 April 2025 Mmat talk contribs uploaded a new version of File:FumehoodsOverview1.jpg
- 13:15, 15 April 2025 User account Massza talk contribs was created automatically
- 12:07, 15 April 2025 User account Luiba talk contribs was created automatically
- 11:19, 15 April 2025 User account Parch talk contribs was created automatically