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- 11:08, 25 January 2024 Bghe talk contribs created page Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-3/SiO2 etch (Created page with "=Etching of very thin layer of SiO2= Pegasus 3 is not meant to be used as an SiO2 etcher. Please do not develop nice SiO2 recipes on this machine. Often SIO2 etch recipes are very polymerizing and that can disturb the chamber conditions for the silicon etching recipes. The recipe developed here is only for etching through a very thin SiO2 layer and does not have a high selectivity to silicon to avoid the recipe to become too polymerizing. So when it is used for etching...")
- 10:54, 25 January 2024 Paphol talk contribs created page File:Wordentec 00.tif
- 10:54, 25 January 2024 Paphol talk contribs uploaded File:Wordentec 00.tif
- 10:53, 25 January 2024 Paphol talk contribs created page File:Lesker 02.tif
- 10:53, 25 January 2024 Paphol talk contribs uploaded File:Lesker 02.tif
- 15:57, 23 January 2024 Bghe talk contribs created page File:C10752 10.jpg (File uploaded with MsUpload)
- 15:57, 23 January 2024 Bghe talk contribs uploaded File:C10752 10.jpg (File uploaded with MsUpload)
- 15:57, 23 January 2024 Bghe talk contribs created page File:C10752 01.jpg (File uploaded with MsUpload)
- 15:57, 23 January 2024 Bghe talk contribs uploaded File:C10752 01.jpg (File uploaded with MsUpload)
- 15:57, 23 January 2024 Bghe talk contribs created page File:C10752 03.jpg (File uploaded with MsUpload)
- 15:57, 23 January 2024 Bghe talk contribs uploaded File:C10752 03.jpg (File uploaded with MsUpload)
- 15:57, 23 January 2024 Bghe talk contribs created page File:C10752 05.jpg (File uploaded with MsUpload)
- 15:57, 23 January 2024 Bghe talk contribs uploaded File:C10752 05.jpg (File uploaded with MsUpload)
- 15:57, 23 January 2024 Bghe talk contribs created page File:C10752 07.jpg (File uploaded with MsUpload)
- 15:57, 23 January 2024 Bghe talk contribs uploaded File:C10752 07.jpg (File uploaded with MsUpload)
- 15:57, 23 January 2024 Bghe talk contribs created page File:C10752 09.jpg (File uploaded with MsUpload)
- 15:57, 23 January 2024 Bghe talk contribs uploaded File:C10752 09.jpg (File uploaded with MsUpload)
- 15:50, 23 January 2024 Bghe talk contribs created page File:C10751 02.jpg (File uploaded with MsUpload)
- 15:50, 23 January 2024 Bghe talk contribs uploaded File:C10751 02.jpg (File uploaded with MsUpload)
- 15:50, 23 January 2024 Bghe talk contribs created page File:C10751 05.jpg (File uploaded with MsUpload)
- 15:50, 23 January 2024 Bghe talk contribs uploaded File:C10751 05.jpg (File uploaded with MsUpload)
- 15:50, 23 January 2024 Bghe talk contribs created page File:C10751 07.jpg (File uploaded with MsUpload)
- 15:50, 23 January 2024 Bghe talk contribs uploaded File:C10751 07.jpg (File uploaded with MsUpload)
- 15:50, 23 January 2024 Bghe talk contribs created page File:C10751 09.jpg (File uploaded with MsUpload)
- 15:50, 23 January 2024 Bghe talk contribs uploaded File:C10751 09.jpg (File uploaded with MsUpload)
- 15:50, 23 January 2024 Bghe talk contribs created page File:C10751 11.jpg (File uploaded with MsUpload)
- 15:50, 23 January 2024 Bghe talk contribs uploaded File:C10751 11.jpg (File uploaded with MsUpload)
- 15:50, 23 January 2024 Bghe talk contribs created page File:C10751 12.jpg (File uploaded with MsUpload)
- 15:50, 23 January 2024 Bghe talk contribs uploaded File:C10751 12.jpg (File uploaded with MsUpload)
- 10:46, 22 January 2024 Thope talk contribs created page File:ARP617SpinCurve.png (File uploaded with MsUpload)
- 10:46, 22 January 2024 Thope talk contribs uploaded File:ARP617SpinCurve.png (File uploaded with MsUpload)
- 10:45, 22 January 2024 Thope talk contribs created page Specific Process Knowledge/Lithography/EBeamLithography/AR-P 617 (Created page with "AR-P 617 is a positive PMMA based E-beam resist from Allresist. =Spin coating= AR-P 617 can be spin coated on LabSpin 2 and 3 using the CSAR/PMMA bowlset. A spin curve for AR-P 617.06 is provided below. Process parameters are: *Coater: LabSpin 3 *Substrate: 2" Si *Acceleration: 1000 RPM/s Time: 60 s Baking temperature: 200C (setpoint at 222C) Baking time: 120 s")
- 18:31, 19 January 2024 Eves talk contribs created page File:Eves Temescal 10 pockets 20240119.JPG (File uploaded with MsUpload)
- 18:31, 19 January 2024 Eves talk contribs uploaded File:Eves Temescal 10 pockets 20240119.JPG (File uploaded with MsUpload)
- 14:08, 18 January 2024 User account Omea talk contribs was created automatically
- 13:43, 17 January 2024 Thope talk contribs uploaded a new version of File:Writing Time Estimator.xlsx
- 12:39, 16 January 2024 Jehem talk contribs created page File:ResistSensitivity UV.png
- 12:39, 16 January 2024 Jehem talk contribs uploaded File:ResistSensitivity UV.png
- 11:28, 15 January 2024 User account Lucvi talk contribs was created automatically
- 15:31, 12 January 2024 Reet talk contribs created page Specific Process Knowledge/Characterization/Stress measurement/Stress origins (new page about stress origins more systematic than before)
- 14:30, 11 January 2024 User account S214433 talk contribs was created automatically
- 14:06, 11 January 2024 Reet talk contribs created page File:Temescal-10-pckt.JPG (File uploaded with MsUpload)
- 14:06, 11 January 2024 Reet talk contribs uploaded File:Temescal-10-pckt.JPG (File uploaded with MsUpload)
- 11:48, 11 January 2024 Reet talk contribs created page Specific Process Knowledge/Thin film deposition/10-pocket e-beam evaporator (Created page with "'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Thin_film_deposition/10-pocket_e-beam_evaporator click here]''' <i> This page is written by <b>DTU Nanolab staff</b></i> 200px This page is under construction ==E-Beam Evaporator (10-pockets)== File:Temescal.JPG|400px|right|thumb|The 10-pocket e-beam evapo...")
- 14:43, 9 January 2024 User account S214438 talk contribs was created automatically
- 13:55, 9 January 2024 User account S214434 talk contribs was created automatically
- 10:16, 9 January 2024 User account S204562 talk contribs was created automatically
- 14:23, 8 January 2024 User account S211910 talk contribs was created automatically
- 15:21, 5 January 2024 User account Shiksin talk contribs was created automatically
- 13:29, 3 January 2024 User account S232197 talk contribs was created automatically