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11:58, 9 November 2023 Eves talk contribs uploaded File:Eves XRR Sc 3mTorr 1000s 100W PC3 Src1 RF home 20231013.png (File uploaded with MsUpload)
11:56, 9 November 2023 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of Scandium (Created page with "'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_Scandium&action=submit click here]''' Unless otherwise stated, this page is written by DTU Nanolab internal == Deposition of Scandium == Deposition of Sc can only be done by sputtering using 4-inch Sc target. The only tool for this applicatio...")
11:48, 9 November 2023 Eves talk contribs created page File:Eves Sc PC3 expended Z shift position.png (File uploaded with MsUpload)
11:48, 9 November 2023 Eves talk contribs uploaded File:Eves Sc PC3 expended Z shift position.png (File uploaded with MsUpload)
11:48, 9 November 2023 Eves talk contribs created page File:Eves Sc PC3 home Z shift position.png (File uploaded with MsUpload)
11:48, 9 November 2023 Eves talk contribs uploaded File:Eves Sc PC3 home Z shift position.png (File uploaded with MsUpload)
11:47, 9 November 2023 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of Scandium Nitride/ScN Reactive RF Sputtering in Cluster Lesker PC3 (Created page with " This page is written by Evgeniy Shkondin @DTU Nanolab if nothing else is stated. All images and photos on this page belongs to DTU Nanolab. The fabrication and characterization described below were conducted in 2022 by Evgeniy Shkondin, DTU Nanolab. This page presents the results of Scandium Nitride deposition using RF Reactive Sputtering in Sputter-System Metal-Nitride (PC3) commonly known as "Cluster Lesker". The depo...")
11:46, 9 November 2023 Eves talk contribs created page File:Eves XRR ScN 3mTorr 1000s 200W PC3 Src1 RF ext 20231013.png (File uploaded with MsUpload)
11:46, 9 November 2023 Eves talk contribs uploaded File:Eves XRR ScN 3mTorr 1000s 200W PC3 Src1 RF ext 20231013.png (File uploaded with MsUpload)
11:46, 9 November 2023 Eves talk contribs created page File:Eves XRR ScN 3mTorr 1000s 150W PC3 Src1 RF home 20231013.png (File uploaded with MsUpload)
11:46, 9 November 2023 Eves talk contribs uploaded File:Eves XRR ScN 3mTorr 1000s 150W PC3 Src1 RF home 20231013.png (File uploaded with MsUpload)
11:46, 9 November 2023 Eves talk contribs created page File:Eves XRR ScN 3mTorr 1000s 150W PC3 Src1 RF ext 20231013.png (File uploaded with MsUpload)
11:46, 9 November 2023 Eves talk contribs uploaded File:Eves XRR ScN 3mTorr 1000s 150W PC3 Src1 RF ext 20231013.png (File uploaded with MsUpload)
11:46, 9 November 2023 Eves talk contribs created page File:Eves XRR ScN 3mTorr 1000s 100W PC3 Src1 RF home 20231013.png (File uploaded with MsUpload)
11:46, 9 November 2023 Eves talk contribs uploaded File:Eves XRR ScN 3mTorr 1000s 100W PC3 Src1 RF home 20231013.png (File uploaded with MsUpload)
11:46, 9 November 2023 Eves talk contribs created page File:Eves XRR ScN 3mTorr 1000s 100W PC3 Src1 RF ext 20231013.png (File uploaded with MsUpload)
11:46, 9 November 2023 Eves talk contribs uploaded File:Eves XRR ScN 3mTorr 1000s 100W PC3 Src1 RF ext 20231013.png (File uploaded with MsUpload)
11:46, 9 November 2023 Eves talk contribs created page File:Eves XPS ScN PC3 Src1 RF Survej 2031019.png (File uploaded with MsUpload)
11:46, 9 November 2023 Eves talk contribs uploaded File:Eves XPS ScN PC3 Src1 RF Survej 2031019.png (File uploaded with MsUpload)
11:46, 9 November 2023 Eves talk contribs created page File:Eves XPS ScN PC3 Src1 RF Sc2p and N1s fit 2031019.png (File uploaded with MsUpload)
11:46, 9 November 2023 Eves talk contribs uploaded File:Eves XPS ScN PC3 Src1 RF Sc2p and N1s fit 2031019.png (File uploaded with MsUpload)
11:46, 9 November 2023 Eves talk contribs created page File:Eves XPS ScN PC3 Src1 RF Sc2p and N1s 2031019.png (File uploaded with MsUpload)
11:46, 9 November 2023 Eves talk contribs uploaded File:Eves XPS ScN PC3 Src1 RF Sc2p and N1s 2031019.png (File uploaded with MsUpload)
11:46, 9 November 2023 Eves talk contribs created page File:Eves XPS ScN PC3 Src1 RF Sc 3s fit 2031019.png (File uploaded with MsUpload)
11:46, 9 November 2023 Eves talk contribs uploaded File:Eves XPS ScN PC3 Src1 RF Sc 3s fit 2031019.png (File uploaded with MsUpload)
11:46, 9 November 2023 Eves talk contribs created page File:Eves XPS ScN PC3 Src1 RF Sc 3s 2031019.png (File uploaded with MsUpload)
11:46, 9 November 2023 Eves talk contribs uploaded File:Eves XPS ScN PC3 Src1 RF Sc 3s 2031019.png (File uploaded with MsUpload)
11:46, 9 November 2023 Eves talk contribs created page File:Eves XPS ScN PC3 Src1 RF O s1 fit 2031019.png (File uploaded with MsUpload)
11:46, 9 November 2023 Eves talk contribs uploaded File:Eves XPS ScN PC3 Src1 RF O s1 fit 2031019.png (File uploaded with MsUpload)
11:46, 9 November 2023 Eves talk contribs created page File:Eves XPS ScN PC3 Src1 RF O s1 2031019.png (File uploaded with MsUpload)
11:46, 9 November 2023 Eves talk contribs uploaded File:Eves XPS ScN PC3 Src1 RF O s1 2031019.png (File uploaded with MsUpload)
11:46, 9 November 2023 Eves talk contribs created page File:Eves XPS ScN PC3 Src1 RF N s1 fit 2031019 new.png (File uploaded with MsUpload)
11:46, 9 November 2023 Eves talk contribs uploaded File:Eves XPS ScN PC3 Src1 RF N s1 fit 2031019 new.png (File uploaded with MsUpload)
11:46, 9 November 2023 Eves talk contribs created page File:Eves XPS ScN PC3 Src1 RF C s1 2031019.png (File uploaded with MsUpload)
11:46, 9 November 2023 Eves talk contribs uploaded File:Eves XPS ScN PC3 Src1 RF C s1 2031019.png (File uploaded with MsUpload)
11:46, 9 November 2023 Eves talk contribs created page File:Eves XPS 2D ScN Sc3s PC3 Src1 RF 20231018.png (File uploaded with MsUpload)
11:46, 9 November 2023 Eves talk contribs uploaded File:Eves XPS 2D ScN Sc3s PC3 Src1 RF 20231018.png (File uploaded with MsUpload)
11:46, 9 November 2023 Eves talk contribs created page File:Eves XPS 2D ScN Sc2p and N1s PC3 Src1 RF 20231018.png (File uploaded with MsUpload)
11:46, 9 November 2023 Eves talk contribs uploaded File:Eves XPS 2D ScN Sc2p and N1s PC3 Src1 RF 20231018.png (File uploaded with MsUpload)
11:46, 9 November 2023 Eves talk contribs created page File:Eves XPS 2D ScN O1s PC3 Src1 RF 20231018.png (File uploaded with MsUpload)
11:46, 9 November 2023 Eves talk contribs uploaded File:Eves XPS 2D ScN O1s PC3 Src1 RF 20231018.png (File uploaded with MsUpload)
11:46, 9 November 2023 Eves talk contribs created page File:Eves XPS 2D ScN C1s PC3 Src1 RF 20231018.png (File uploaded with MsUpload)
11:46, 9 November 2023 Eves talk contribs uploaded File:Eves XPS 2D ScN C1s PC3 Src1 RF 20231018.png (File uploaded with MsUpload)
11:46, 9 November 2023 Eves talk contribs created page File:Eves SEM ScN 3mTorr 1000s 200W PC3 Src1 RF ext image3 20231013.png (File uploaded with MsUpload)
11:46, 9 November 2023 Eves talk contribs uploaded File:Eves SEM ScN 3mTorr 1000s 200W PC3 Src1 RF ext image3 20231013.png (File uploaded with MsUpload)
11:46, 9 November 2023 Eves talk contribs created page File:Eves SEM ScN 3mTorr 1000s 200W PC3 Src1 RF ext image2 20231013.png (File uploaded with MsUpload)
11:46, 9 November 2023 Eves talk contribs uploaded File:Eves SEM ScN 3mTorr 1000s 200W PC3 Src1 RF ext image2 20231013.png (File uploaded with MsUpload)
11:46, 9 November 2023 Eves talk contribs created page File:Eves SEM ScN 3mTorr 1000s 200W PC3 Src1 RF ext image1 20231013.png (File uploaded with MsUpload)
11:46, 9 November 2023 Eves talk contribs uploaded File:Eves SEM ScN 3mTorr 1000s 200W PC3 Src1 RF ext image1 20231013.png (File uploaded with MsUpload)
11:46, 9 November 2023 Eves talk contribs created page File:Eves ScN deposition rate 20231018.png (File uploaded with MsUpload)