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• 14:01, 3 October 2023 Mfarin talk contribs uploaded File:Low45 0 af PA 05.png (File uploaded with MsUpload)
• 14:01, 3 October 2023 Mfarin talk contribs created page File:Low35 10 af PA 12.png (File uploaded with MsUpload)
• 14:01, 3 October 2023 Mfarin talk contribs uploaded File:Low35 10 af PA 12.png (File uploaded with MsUpload)
• 14:01, 3 October 2023 Mfarin talk contribs created page File:CF4owCP 20min af PA 03.png (File uploaded with MsUpload)
• 14:01, 3 October 2023 Mfarin talk contribs uploaded File:CF4owCP 20min af PA 03.png (File uploaded with MsUpload)
• 14:01, 3 October 2023 Mfarin talk contribs created page File:CF4lowCP 45.10 22.png (File uploaded with MsUpload)
• 14:01, 3 October 2023 Mfarin talk contribs uploaded File:CF4lowCP 45.10 22.png (File uploaded with MsUpload)
• 14:01, 3 October 2023 Mfarin talk contribs created page File:CF4lowCP 35.10 10.png (File uploaded with MsUpload)
• 14:01, 3 October 2023 Mfarin talk contribs uploaded File:CF4lowCP 35.10 10.png (File uploaded with MsUpload)
• 14:01, 3 October 2023 Mfarin talk contribs created page File:CF4lowCP 20m pat C03.png (File uploaded with MsUpload)
• 14:01, 3 October 2023 Mfarin talk contribs uploaded File:CF4lowCP 20m pat C03.png (File uploaded with MsUpload)
• 14:01, 3 October 2023 Mfarin talk contribs created page File:CF4lowCP.right 01.png (File uploaded with MsUpload)
• 14:01, 3 October 2023 Mfarin talk contribs uploaded File:CF4lowCP.right 01.png (File uploaded with MsUpload)
• 13:57, 3 October 2023 Mfarin talk contribs created page File:200px-CF4ICP 45.0c bf PA 04.png (File uploaded with MsUpload)
• 13:57, 3 October 2023 Mfarin talk contribs uploaded File:200px-CF4ICP 45.0c bf PA 04.png (File uploaded with MsUpload)
• 13:57, 3 October 2023 Mfarin talk contribs created page File:200px-CF4ICP 45.0c af Pa-bot 06.png (File uploaded with MsUpload)
• 13:57, 3 October 2023 Mfarin talk contribs uploaded File:200px-CF4ICP 45.0c af Pa-bot 06.png (File uploaded with MsUpload)
• 13:57, 3 October 2023 Mfarin talk contribs created page File:200px-45.10 af PA center 07.png (File uploaded with MsUpload)
• 13:57, 3 October 2023 Mfarin talk contribs uploaded File:200px-45.10 af PA center 07.png (File uploaded with MsUpload)
• 13:57, 3 October 2023 Mfarin talk contribs created page File:200px-45.10 af ASE 01.png (File uploaded with MsUpload)
• 13:57, 3 October 2023 Mfarin talk contribs uploaded File:200px-45.10 af ASE 01.png (File uploaded with MsUpload)
• 13:57, 3 October 2023 Mfarin talk contribs created page File:200px-35.10 af PA bot 03.png (File uploaded with MsUpload)
• 13:57, 3 October 2023 Mfarin talk contribs uploaded File:200px-35.10 af PA bot 03.png (File uploaded with MsUpload)
• 13:57, 3 October 2023 Mfarin talk contribs created page File:200px-35.10 af ase 04.png (File uploaded with MsUpload)
• 13:57, 3 October 2023 Mfarin talk contribs uploaded File:200px-35.10 af ase 04.png (File uploaded with MsUpload)
• 13:54, 3 October 2023 Mfarin talk contribs created page File:CF4ICP 11min C 01.png (File uploaded with MsUpload)
• 13:54, 3 October 2023 Mfarin talk contribs uploaded File:CF4ICP 11min C 01.png (File uploaded with MsUpload)
• 13:54, 3 October 2023 Mfarin talk contribs created page File:800px-CF4ICP 11min C 03.png (File uploaded with MsUpload)
• 13:54, 3 October 2023 Mfarin talk contribs uploaded File:800px-CF4ICP 11min C 03.png (File uploaded with MsUpload)
• 13:54, 3 October 2023 Mfarin talk contribs created page File:800px-CF4ICP 11min af PA top 01.png (File uploaded with MsUpload)
• 13:54, 3 October 2023 Mfarin talk contribs uploaded File:800px-CF4ICP 11min af PA top 01.png (File uploaded with MsUpload)
• 13:48, 3 October 2023 Mfarin talk contribs created page Specific Process Knowledge/Etch/Etching of Silicon Oxide/SiO2 etch using ASE/More test with CF4/H2, CHF3 and C4F8/H2 - SiO2 etch (Created page with "More test with CF4/H2, CHF3 and C4F8/H2 - SiO2 etch")
• 16:37, 19 July 2023 Mfarin talk contribs created page Specific Process Knowledge/Etch/Etching of Silicon Oxide/SiO2 etch using ASE/Unstable recipes - SiO2 etch (Created page with "=SiO2 etch with resist mask on wafer with clamping and He backside cooling= {{CC-bghe2}}, ''May 2018'' The ASE is now the "dirty" plasma etcher at Nanolab meaning small amount of metals are allowed to be exposed by the plasma. That calls for recipes etching Silicon oxide and silicon nitride as well as silicon in this machine. Not a lot experiments have been done yet etching SiO2 on wafers that are clamped and cooled but here is the best result so fare. <span style="b...")
• 14:54, 30 May 2023 Mfarin talk contribs created page File:Low22.5-af-PA-04.png (File uploaded with MsUpload)
• 14:54, 30 May 2023 Mfarin talk contribs uploaded File:Low22.5-af-PA-04.png (File uploaded with MsUpload)
• 14:54, 30 May 2023 Mfarin talk contribs created page File:Low22.5-af-PA-08.png (File uploaded with MsUpload)
• 14:54, 30 May 2023 Mfarin talk contribs uploaded File:Low22.5-af-PA-08.png (File uploaded with MsUpload)
• 14:53, 30 May 2023 Mfarin talk contribs created page File:Low35-10-af-PA-06.png (File uploaded with MsUpload)
• 14:53, 30 May 2023 Mfarin talk contribs uploaded File:Low35-10-af-PA-06.png (File uploaded with MsUpload)
• 14:53, 30 May 2023 Mfarin talk contribs created page File:Low35-10-af-PA-12.png (File uploaded with MsUpload)
• 14:53, 30 May 2023 Mfarin talk contribs uploaded File:Low35-10-af-PA-12.png (File uploaded with MsUpload)
• 14:52, 30 May 2023 Mfarin talk contribs created page File:Low45-0-af-PA-03.png (File uploaded with MsUpload)
• 14:52, 30 May 2023 Mfarin talk contribs uploaded File:Low45-0-af-PA-03.png (File uploaded with MsUpload)
• 14:52, 30 May 2023 Mfarin talk contribs created page File:Low45-0-af-PA-08.png (File uploaded with MsUpload)
• 14:52, 30 May 2023 Mfarin talk contribs uploaded File:Low45-0-af-PA-08.png (File uploaded with MsUpload)
• 10:52, 26 May 2023 Mfarin talk contribs created page File:CF4lowCP-45.10-22.png (File uploaded with MsUpload)
• 10:52, 26 May 2023 Mfarin talk contribs uploaded File:CF4lowCP-45.10-22.png (File uploaded with MsUpload)
• 10:52, 26 May 2023 Mfarin talk contribs created page File:45.10-af-PA-center-07.png (File uploaded with MsUpload)
• 10:51, 26 May 2023 Mfarin talk contribs uploaded File:45.10-af-PA-center-07.png (File uploaded with MsUpload)
• 10:51, 26 May 2023 Mfarin talk contribs created page File:CF4ICP-35.10-39.png (File uploaded with MsUpload)