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11:31, 16 August 2023 Thope talk contribs created page File:BEAMER Impot.png (File uploaded with MsUpload)
11:31, 16 August 2023 Thope talk contribs uploaded File:BEAMER Impot.png (File uploaded with MsUpload)
11:45, 15 August 2023 Thope talk contribs created page File:PositiveNegative.png (File uploaded with MsUpload)
11:45, 15 August 2023 Thope talk contribs uploaded File:PositiveNegative.png (File uploaded with MsUpload)
23:49, 5 May 2023 Thope talk contribs created page Specific Process Knowledge/Lithography/EBeamLithography/JEOLAlignment (Created page with "=Aligned exposure on JEOL 9500= There is quite a few things to remember in order to align an exposure to an existing pattern. The example below is a step by step guide illustrating global substrate alignment as well as chip alignment. ==Job preparation== ==Chip alignment== Chip alignment requires a global alignment to be made first to establish the wafer coordinate system. Hence a global alignment using '''GLMDET''' is used initially as in the example above. To further...")
11:40, 19 April 2023 Thope talk contribs created page File:EBLChipAlignExample.png (File uploaded with MsUpload)
11:40, 19 April 2023 Thope talk contribs uploaded File:EBLChipAlignExample.png (File uploaded with MsUpload)
08:21, 18 April 2023 Thope talk contribs created page File:ELine dose.PNG (File uploaded with MsUpload)
08:21, 18 April 2023 Thope talk contribs uploaded File:ELine dose.PNG (File uploaded with MsUpload)
22:57, 16 April 2023 Thope talk contribs uploaded a new version of File:EBL align.png (File uploaded with MsUpload)
22:48, 16 April 2023 Thope talk contribs created page File:EBL align.png (File uploaded with MsUpload)
22:48, 16 April 2023 Thope talk contribs uploaded File:EBL align.png (File uploaded with MsUpload)
17:22, 16 April 2023 Thope talk contribs created page File:EBL Achk limit.png (File uploaded with MsUpload)
17:22, 16 April 2023 Thope talk contribs uploaded File:EBL Achk limit.png (File uploaded with MsUpload)
15:04, 13 April 2023 Thope talk contribs uploaded a new version of File:EBLFields.png (File uploaded with MsUpload)
13:15, 13 April 2023 Thope talk contribs uploaded a new version of File:EBLFields.png (File uploaded with MsUpload)
13:12, 13 April 2023 Thope talk contribs created page File:EBLFields.png (File uploaded with MsUpload)
13:12, 13 April 2023 Thope talk contribs uploaded File:EBLFields.png (File uploaded with MsUpload)
08:23, 13 April 2023 Thope talk contribs created page File:EBLBeamShots.png (File uploaded with MsUpload)
08:23, 13 April 2023 Thope talk contribs uploaded File:EBLBeamShots.png (File uploaded with MsUpload)
14:14, 8 April 2023 Thope talk contribs created page Specific Process Knowledge/Lithography/EBeamLithography/EBLsubstratePrep (Created page with "=== Resist coating === An appropriate EBL resist must naturally be applied to the substrate. DTU Nanolab supplies a number of standard resists, please consult the table below. The default positive EBL resist is AR-P 6200.09 (CSAR). CSAR installed on Spin Coater: Gamma E-beam and UV for spin coating of 2", 4" and 6" substrates. For other substrate sizes (i.e. chips) or other resists Spec...")
14:13, 8 April 2023 Thope talk contribs created page Specific Process Knowledge/Lithography/EBL/EBLsubstratePrep (Created page with "=== Resist coating === An appropriate EBL resist must naturally be applied to the substrate. DTU Nanolab supplies a number of standard resists, please consult the table below. The default positive EBL resist is AR-P 6200.09 (CSAR). CSAR installed on Spin Coater: Gamma E-beam and UV for spin coating of 2", 4" and 6" substrates. For other substrate sizes (i.e. chips) or other resists Spec...")
20:20, 28 March 2023 Thope talk contribs created page Specific Process Knowledge/Lithography/ARN7500 (Created page with "Information on AR-N 7500 to come.")
19:42, 25 March 2023 Thope talk contribs created page File:9500Column.png (File uploaded with MsUpload)
19:42, 25 March 2023 Thope talk contribs uploaded File:9500Column.png (File uploaded with MsUpload)
13:11, 14 March 2023 Thope talk contribs created page File:WritingTimeEstimator.xlsx (File uploaded with MsUpload)
13:11, 14 March 2023 Thope talk contribs uploaded File:WritingTimeEstimator.xlsx (File uploaded with MsUpload)
12:28, 14 March 2023 Thope talk contribs created page Specific Process Knowledge/Lithography/EBeamLithography/JEOL 9500 User Guide (Created page with "= Purpose, location and technical specifications = ==Type and location of machine== The JEOL JBX-9500FS electron beam lithography system is a spot electron beam lithography system designed for use in writing patterns (10 nm - 1 µm) in electron sensitive resists. The JEOL JBX-9500FS was purchased in 2012 and is installed in E-1 and E-2 at DTU Nanolabv. The main console of the e-beam writer is installed in E-2 which is a class 10 (ISO 4) cleanroom with tight temperature...")
11:46, 13 March 2023 Thope talk contribs created page File:JDF ARRAY.png (File uploaded with MsUpload)
11:46, 13 March 2023 Thope talk contribs uploaded File:JDF ARRAY.png (File uploaded with MsUpload)
10:57, 11 March 2023 Thope talk contribs created page File:BeamPitch.png (File uploaded with MsUpload)
10:57, 11 March 2023 Thope talk contribs uploaded File:BeamPitch.png (File uploaded with MsUpload)
14:06, 10 March 2023 Thope talk contribs created page File:BEAMER PEC2.png (File uploaded with MsUpload)
14:06, 10 March 2023 Thope talk contribs uploaded File:BEAMER PEC2.png (File uploaded with MsUpload)
13:29, 10 March 2023 Thope talk contribs created page Specific Process Knowledge/Lithography/EBeamLithography/TRACER (Created page with "=PSF generation with Tracer= To come")
10:20, 10 March 2023 Thope talk contribs created page Specific Process Knowledge/Lithography/EBeamLithography/JEOL 9500 trouble shooting (Created page with "To come")
14:39, 8 March 2023 Thope talk contribs created page File:9500CoordinateSystem.png (File uploaded with MsUpload)
14:39, 8 March 2023 Thope talk contribs uploaded File:9500CoordinateSystem.png (File uploaded with MsUpload)
11:17, 8 March 2023 Thope talk contribs created page File:B6025-025.png (File uploaded with MsUpload)
11:17, 8 March 2023 Thope talk contribs uploaded File:B6025-025.png (File uploaded with MsUpload)
09:57, 8 March 2023 Thope talk contribs created page File:BW6-009.png (File uploaded with MsUpload)
09:57, 8 March 2023 Thope talk contribs uploaded File:BW6-009.png (File uploaded with MsUpload)
09:57, 28 February 2023 Thope talk contribs created page File:SuperEdi.png (File uploaded with MsUpload)
09:57, 28 February 2023 Thope talk contribs uploaded File:SuperEdi.png (File uploaded with MsUpload)
14:38, 27 February 2023 Thope talk contribs created page File:TPE02819-2.jpg (File uploaded with MsUpload)
14:38, 27 February 2023 Thope talk contribs uploaded File:TPE02819-2.jpg (File uploaded with MsUpload)
13:20, 25 February 2023 Thope talk contribs created page File:BeamScatter4.png (File uploaded with MsUpload)
13:20, 25 February 2023 Thope talk contribs uploaded File:BeamScatter4.png (File uploaded with MsUpload)
13:19, 25 February 2023 Thope talk contribs uploaded a new version of File:BeamScatter2.png (File uploaded with MsUpload)
12:04, 25 February 2023 Thope talk contribs created page File:BeamScatter3.png (File uploaded with MsUpload)