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• 22:27, 1 February 2023 Eves talk contribs uploaded File:Eves 2theta omega scan concept 1 20230131.png (File uploaded with MsUpload)
• 22:27, 1 February 2023 Eves talk contribs created page File:Eves types of scans 20230131.png (File uploaded with MsUpload)
• 22:27, 1 February 2023 Eves talk contribs uploaded File:Eves types of scans 20230131.png (File uploaded with MsUpload)
• 22:27, 1 February 2023 Eves talk contribs created page File:Eves theta2theta scan concept 20230131.png (File uploaded with MsUpload)
• 22:27, 1 February 2023 Eves talk contribs uploaded File:Eves theta2theta scan concept 20230131.png (File uploaded with MsUpload)
• 16:29, 1 February 2023 Eves talk contribs created page File:Eves Pd XRR 20230201.png (File uploaded with MsUpload)
• 16:29, 1 February 2023 Eves talk contribs uploaded File:Eves Pd XRR 20230201.png (File uploaded with MsUpload)
• 11:05, 1 February 2023 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of Palladium/Pd sputtering in Sputter System (Lesker) (Created page with "This section is written by Evgeniy Shkondin @DTU Nanolab if nothing else is stated. All images and photos on this page belonges to DTU Nanolab")
• 18:48, 4 January 2023 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of Chromium/Sputtering of Cr in Cluster Lesker PC1 (Created page with "This page presents the results of Cr deposition using DC sputtering in Sputter-System Metal-Oxide(PC1), now commonly known as "Cluster Lesker". The deposition target is Cr 3-inch. Source #3 (DC - HSM) was used. Cr is of particular interest in the dry etch as it serves as a durable hard mask in the quest to go beyond an aspect ratio of 100 in Si etching. Many users combines deposition of Cr with RF sputtering of Si to build the CrSi bilayer structure that acts as a hard...")
• 18:48, 4 January 2023 Eves talk contribs created page File:Eves XPs Cr PC1 Src3 O1s 20230104.png (File uploaded with MsUpload)
• 18:48, 4 January 2023 Eves talk contribs uploaded File:Eves XPs Cr PC1 Src3 O1s 20230104.png (File uploaded with MsUpload)
• 18:48, 4 January 2023 Eves talk contribs created page File:Eves XPS Cr PC1 Src3 DC Survey surf 20230104.png (File uploaded with MsUpload)
• 18:48, 4 January 2023 Eves talk contribs uploaded File:Eves XPS Cr PC1 Src3 DC Survey surf 20230104.png (File uploaded with MsUpload)
• 18:48, 4 January 2023 Eves talk contribs created page File:Eves XPS Cr PC1 Src3 DC Survey bulk 20230104.png (File uploaded with MsUpload)
• 18:48, 4 January 2023 Eves talk contribs uploaded File:Eves XPS Cr PC1 Src3 DC Survey bulk 20230104.png (File uploaded with MsUpload)
• 18:48, 4 January 2023 Eves talk contribs created page File:Eves XPS Cr PC1 Src3 DC atm conc 20230104.png (File uploaded with MsUpload)
• 18:48, 4 January 2023 Eves talk contribs uploaded File:Eves XPS Cr PC1 Src3 DC atm conc 20230104.png (File uploaded with MsUpload)
• 18:48, 4 January 2023 Eves talk contribs created page File:Eves XPS Cr PC1 Src3 DC 2D 20230104.png (File uploaded with MsUpload)
• 18:48, 4 January 2023 Eves talk contribs uploaded File:Eves XPS Cr PC1 Src3 DC 2D 20230104.png (File uploaded with MsUpload)
• 18:48, 4 January 2023 Eves talk contribs created page File:Eves XPs Cr PC1 Src3 Cr2p 20230104.png (File uploaded with MsUpload)
• 18:48, 4 January 2023 Eves talk contribs uploaded File:Eves XPs Cr PC1 Src3 Cr2p 20230104.png (File uploaded with MsUpload)
• 18:48, 4 January 2023 Eves talk contribs created page File:Eves deprec Cr PC1 Src3 DC voltage 20230104.png (File uploaded with MsUpload)
• 18:48, 4 January 2023 Eves talk contribs uploaded File:Eves deprec Cr PC1 Src3 DC voltage 20230104.png (File uploaded with MsUpload)
• 18:48, 4 January 2023 Eves talk contribs created page File:Eves deprec Cr PC1 Src3 DC subs shutter 20230104.png (File uploaded with MsUpload)
• 18:48, 4 January 2023 Eves talk contribs uploaded File:Eves deprec Cr PC1 Src3 DC subs shutter 20230104.png (File uploaded with MsUpload)
• 18:48, 4 January 2023 Eves talk contribs created page File:Eves deprec Cr PC1 Src3 DC src shutter 20230104.png (File uploaded with MsUpload)
• 18:48, 4 January 2023 Eves talk contribs uploaded File:Eves deprec Cr PC1 Src3 DC src shutter 20230104.png (File uploaded with MsUpload)
• 18:48, 4 January 2023 Eves talk contribs created page File:Eves deprec Cr PC1 Src3 DC pressure 20230104.png (File uploaded with MsUpload)
• 18:48, 4 January 2023 Eves talk contribs uploaded File:Eves deprec Cr PC1 Src3 DC pressure 20230104.png (File uploaded with MsUpload)
• 18:48, 4 January 2023 Eves talk contribs created page File:Eves deprec Cr PC1 Src3 DC power 20230104.png (File uploaded with MsUpload)
• 18:48, 4 January 2023 Eves talk contribs uploaded File:Eves deprec Cr PC1 Src3 DC power 20230104.png (File uploaded with MsUpload)
• 18:48, 4 January 2023 Eves talk contribs created page File:Eves Cr PC1 Src3 XRR 20230104.png (File uploaded with MsUpload)
• 18:48, 4 January 2023 Eves talk contribs uploaded File:Eves Cr PC1 Src3 XRR 20230104.png (File uploaded with MsUpload)
• 18:48, 4 January 2023 Eves talk contribs created page File:Eves Cr PC1 Src3 particle scan g4 20230104 2.png (File uploaded with MsUpload)
• 18:48, 4 January 2023 Eves talk contribs uploaded File:Eves Cr PC1 Src3 particle scan g4 20230104 2.png (File uploaded with MsUpload)
• 18:48, 4 January 2023 Eves talk contribs created page File:Eves Cr PC1 Src3 particle scan g3 20230104 2.png (File uploaded with MsUpload)
• 18:48, 4 January 2023 Eves talk contribs uploaded File:Eves Cr PC1 Src3 particle scan g3 20230104 2.png (File uploaded with MsUpload)
• 18:48, 4 January 2023 Eves talk contribs created page File:Eves XPs Cr PC1 Src3 Si2p 20230104.png (File uploaded with MsUpload)
• 18:48, 4 January 2023 Eves talk contribs uploaded File:Eves XPs Cr PC1 Src3 Si2p 20230104.png (File uploaded with MsUpload)
• 15:41, 3 January 2023 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of Chromium/Sputtering of Cr in Cluster Lesker PC3 (Created page with "This page presents the results of Cr deposition using DC sputtering in Sputter-system Metal-Nitride (PC3), now commonly known as "Cluster Lesker". The deposition target is Cr 3-inch. Source #2 (DC/p-DC) was used. The fabrication and characterization described below were conducted in <i>2022 by Evgeniy Shkondin, DTU Nanolab</i>. The focus of the study was the deposition conditions and uniformity check across 150mm wafer. The prepared film was investigated by the X-ray...")
• 15:41, 3 January 2023 Eves talk contribs created page File:Eves XRR Cr center PC3 Src2 DC 20230103.png (File uploaded with MsUpload)
• 15:41, 3 January 2023 Eves talk contribs uploaded File:Eves XRR Cr center PC3 Src2 DC 20230103.png (File uploaded with MsUpload)
• 15:41, 3 January 2023 Eves talk contribs created page File:Eves XRR Cr edge PC3 Src2 DC 20230103.png (File uploaded with MsUpload)
• 15:41, 3 January 2023 Eves talk contribs uploaded File:Eves XRR Cr edge PC3 Src2 DC 20230103.png (File uploaded with MsUpload)
• 14:53, 2 January 2023 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of Tungsten/HiPIMS Sputtering of W in Sputter-system Metal-Nitride (PC3) (Created page with "Tungsten (W) can be deposited using either e-beam or sputtering methods (at DTU Nanolab). The e-beam method is challenging since a lot of power is involved and focused on the target. This can potentially destabilize the chamber, due to heat generation and the rapid pressure increase. To avoid that a low deposition rate (0.5 Å/s - 1 Å/s) and limited thicknesses have to be selected. The resulting film usually suffers from low density (porosity) and high oxygen levels. On...")
• 14:53, 2 January 2023 Eves talk contribs created page File:Eves W XRR HiPIMS 25mu with kick 20221229.png (File uploaded with MsUpload)
• 14:53, 2 January 2023 Eves talk contribs uploaded File:Eves W XRR HiPIMS 25mu with kick 20221229.png (File uploaded with MsUpload)
• 14:53, 2 January 2023 Eves talk contribs created page File:Eves W XRR HiPIMS 20mu with kick 20221229.png (File uploaded with MsUpload)
• 14:53, 2 January 2023 Eves talk contribs uploaded File:Eves W XRR HiPIMS 20mu with kick 20221229.png (File uploaded with MsUpload)
• 14:53, 2 January 2023 Eves talk contribs created page File:Eves W XRR HiPIMS 20mu no kick 20221229.png (File uploaded with MsUpload)