Deletion log

Below is a list of the most recent deletions.

14:26, 18 August 2021 Bghe talk contribs deleted page LabAdviser/CEN/Quanta 3D FIB/SEM (content before blanking was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=LabAdviser/CEN/Quanta_3D_FIB/SEM click here]''' <!-- Replace "http://l...")
09:52, 12 August 2021 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of Silicon Oxide/Reactivly sputtered SiO2 in Sputter-System Metal Oxide (PC1) (content before blanking was: " =Reactive sputtering of SiO2= This page presents the results of SiO2 deposition using RF reactive sputtering in Specific_Process_Knowledge/Thin_film_deposition/Cluster-based_multi-chamber_...")
16:24, 28 April 2021 Bghe talk contribs deleted page Specific Process Knowledge/Etch/DRIE-Pegasus 4/Barc etch (content before blanking was: "==Barc etch with O2== ''By bghe@nanolab June 2020'' ===Sample=== *6" Si * 2µm SiO2 from C1 *90nm barc *907 nm UVN 2030-0,5 *Reticle: Pegreticle *Dose: 200 J/m2 ===Pegasus 4 settings=== *Recipe: Barc O2 *With 30 mm spacer...")
14:24, 21 January 2021 Bghe talk contribs deleted page Editing Specific Process Knowledge/Thin film deposition/Deposition of polysilicon/Deposition of polysilicon using LPCVD/Standard recipes, QC limits and results for the 4" polysilicon furnace/Boron doped poly-Si and a-Si (content was: "=THIS PAGE IS UNDER CONSTRUCTION200px=")
15:08, 12 November 2020 Jehan talk contribs deleted page Specific Process Knowledge/Thin film deposition/III-V Dielectric evaporator/SettingImages (content was: "=== Images of Settings files for Dielectric evaporator === UNDER CONSTRUCTIONimage:Under_construction.png|70px..." (and the only contributor was "Jehan"))
15:15, 18 June 2020 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/ALD Picosun R200/AlN deposition using ALD2/Acceptance test AlN (content was: "==AlN with N2 plasma==  The test was done with 300 cycles at 350 °C where the growth rate was measured to be '''0.0625 nm/cycl..." (and the only contributor was "Eves"))
14:58, 18 June 2020 Bghe talk contribs deleted page Technology Development of Nanoscale Silicon Plasma Etching Process (content was: "=Technology Development of Nanoscale Silicon Plasma Etching process for Novel Devices and Applications= *'''Project type:''' Ph.D. project *'''Project responsible..." (and the only contributor was "Vthongu"))
10:43, 6 May 2020 Bghe talk contribs deleted page LabAdviser/Technology Research/Cleanroom fabrication of 3D electrodes with lithography and pyrolysis (content was: "'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/Technology_R..." (and the only contributor was "Bghe"))
15:55, 24 March 2020 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Electroplating-Cu (Request fra Rebecca)
14:40, 24 March 2020 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of NiFe/Sputtering of NiFe in the Lesker sputter system (content before blanking was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_NiFe/Sputterin...")
11:41, 20 March 2020 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of Al Si (By request from Rebecca)
16:00, 19 March 2020 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Multisource PVD (request from Rebecca)
09:58, 17 March 2020 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of Aluminium/Comparison of roughness and other surface characteristics for different methods of Aluminium deposition (content before blanking was: " The surface of an Al thin film was checked with AFM. '''Thermal deposition''' In Wordentec Al can be deposited by using thermal evaporation. The AFM image shown below is recorded on such a film. It shows that the sur...")
09:36, 17 March 2020 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Alcatel (content before blanking was: "'''Feedback to this page''': '''[mailto:pvd@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=Specific_Process_Knowledge/Thin_film_deposition/Alcatel&action=edit click her...")
09:36, 17 March 2020 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/III-V Dielectric evaporator (Author request: content before blanking was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=Specific_Process_Knowledge/Thin_film_deposition/III-V_D...)
10:02, 21 February 2020 Bghe talk contribs deleted page Thick layers (content was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Thick_layers click here]''' '''Thicker layers''' Practical experience has shown that at s...")
13:04, 7 February 2020 Bghe talk contribs deleted page SiO2 DOE (content before blanking was: "'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/III_V_RIE_ETCHES/SiO2_DOE click here]''' =...")
09:30, 12 September 2019 Bghe talk contribs deleted page LabAdviser/New equipment in the pipeline and Old equipment for decommissioning (content was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/LabAdviser/New_equipment_in_the_pipeline_and_Old_equipment_for_decommissioning click here]''...")
14:52, 22 August 2019 Bghe talk contribs deleted page Specific Process Knowledge/Lithography/Pattern Design and Mask Fabrication/CleWin (content before blanking was: " '''Feedback to this page''': '''[mailto:danchipsupport@danchip.dtu.dk?Subject=Feed%20back%20fro...")
12:15, 22 August 2019 Bghe talk contribs deleted page Specific Process Knowledge/Lithography/Pattern Design and Mask Fabrication (content before blanking was: "= Pattern Design and Mask Fabrication = '''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Lithograp...")
15:50, 20 August 2019 Bghe talk contribs deleted page Specific Process Knowledge/Thermal Process/C1 Anneal Oxide furnace (content was: "#REDIRECT Specific Process Knowledge/Thermal Process/C2 Gate Oxide furnace" (and the only contributor was "Pvl"))
15:50, 20 August 2019 Bghe talk contribs deleted page Specific Process Knowledge/Thermal Process/C2 Furnace Anneal Oxide (Author request: Equipment is decommissioned)
10:13, 26 June 2019 Bghe talk contribs deleted page Specific Process Knowledge/Etch/Comparison (A similar page is elsewhere)
14:11, 1 March 2019 Bghe talk contribs deleted page Specific Process Knowledge/Pattern Design/CleWin (Author request: by Jesper 2019-02-22)
10:50, 31 October 2018 Bghe talk contribs deleted page Specific Process Knowledge/Characterization/SEM FEI Nova 600 NanoSEM/Image Gallery (content was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowle..." (and the only contributor was "Hoal"))
10:50, 31 October 2018 Bghe talk contribs deleted page Specific Process Knowledge/Characterization/Tecnai TEM/TEM (content was: "'''Bright Field:''' <br\> In this mode the contrast formation is formed directly by absorption and scattering of electrons in the sample. Thicker regions of the sample,..." (and the only contributor was "Wihu"))
10:49, 31 October 2018 Bghe talk contribs deleted page Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy/FEI (content was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledg..." (and the only contributor was "Jml"))
10:47, 31 October 2018 Bghe talk contribs deleted page Specific Process Knowledge/CEN/Sample Holders (content was: "=THIS PAGE IS UNDER CONSTRUCTION200px= '''Feedback to this page''': '''[mailto:labadviser@danc..." (and the only contributor was "Bghe"))
14:21, 26 October 2018 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of Aluminium Nitride/AlN in PVD co-sputter/Setting 4 (content before blanking was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_Aluminiu...")
08:43, 18 October 2018 Bghe talk contribs deleted page Specific Process Knowledge/Back-end processing/Mask making (content was: "'''Feedback to this page''': '''[mailto:danchipsupport@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=Specific_Process_Knowledge/Back-end_processing/Mask_making click here]''' <!-- Rep...")
08:38, 18 October 2018 Bghe talk contribs deleted page Specific Process Knowledge/Lithography/DUVStepperLithography/Process Flow (content was: "The SÜSS Spinner-Stepper is dedicated for spinning DUV resists. Please note that a Bottom Anti-Reflective Coating (BARC) is necessary to guarantee high quality of bo..." (and the only contributor was "Makei"))
11:25, 16 August 2018 Bghe talk contribs deleted page Technology Research/Fabrication of Hyperbolic Metamaterials using Atomic Layer Deposition/Procces flow (content was: "====Procces flow description==== The substrates for the samples were fabricated by depositing 1 μm of Si3N4 (the resonator layer) on 100 mm sili..." (and the only contributor was "Eves"))
15:30, 15 August 2018 Bghe talk contribs deleted page Reticle Design (content was: "trert" (and the only contributor was "Makei"))
15:22, 15 August 2018 Bghe talk contribs deleted page Specific Process Knowledge/Lithography/UVExposure/travka (content was: "delete me!!")
15:56, 13 August 2018 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of Silicon/Si sputter Alcatel (content was: " ===This machine is no longer used for sputtering process=== == Sputtered Silicon in the Alcatel== This process is not running stable nowadays so we recommend you to consider other Si deposition processe...")
15:55, 13 August 2018 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of NiCr/Deposition parameters NiCr (content was: "== The machine will be decommissioned soon== '''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=Specific_...")
15:55, 13 August 2018 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of Silicon Oxide/Deposition of Silicon Oxide using Lesker sputter tool (content was: "'''Feedback to this page''': '''[mailto:danchipsupport@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_Silicon_Oxide/Deposition_o...")
15:55, 13 August 2018 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of TiW/Sputtering of TiW in Wordentec/Grain size and uniformity of TiW layers (content was: "For the sputter process, the effect and argon pressure can be set to different values. Depending on the process parameters, the deposited layers will have different characteristics: the roughness, grain size and uniformity may be differn...")
15:17, 13 August 2018 Bghe talk contribs deleted page Specific Process Knowledge/Etch/DRIE-Pegasus/Advanced Processing (content was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowle..." (and the only contributor was "Bghe"))
15:13, 13 August 2018 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of MgB/MgB in PVD co-sputter (content was: "=THIS PAGE IS UNDER CONSTRUCTION200px= '''Feedback to this page''': '''[mailto:labadviser@..." (and the only contributor was "Paphol"))
14:04, 20 July 2018 Bghe talk contribs deleted page LabAdviser/Technology Research/Nanoscale characterization of ultra-thin metal films for nanofabrication applications/Transmission Kikuchi diffraction (content before blanking was: "A. B. da Silva Fanta, M. Todeschini, A. Burrows, H. Jansen, C. D. Damsgaard, H. Alimadadi, and J. B. Wagner Materials Characterization, vol. 139, pp. 452-462, 2018.")
12:41, 12 March 2018 Bghe talk contribs deleted page Quick check list for EBSD measurement (was placed outside folder structure)
12:32, 12 March 2018 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Leybold (No æonger in the cleanroom)
12:02, 12 March 2018 Bghe talk contribs deleted page Specific Process Knowledge/Characterization/SEM Zeiss Supra 60VP (According to PEVO)
12:01, 12 March 2018 Bghe talk contribs deleted page Specific Process Knowledge/Characterization/SEM Zeiss (according to PEVO)
12:00, 12 March 2018 Bghe talk contribs deleted page Specific Process Knowledge/III-V Process/photolithography (content was: "'''Feedback to this page''': '''[mailto:photolith@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge..." (and the only contributor was "Jml"))
11:58, 12 March 2018 Bghe talk contribs deleted page Specific Process Knowledge/Lithography/CoatersNEW (TARAN asked for it to be deleted)
11:54, 12 March 2018 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of AlTi/Deposition parameters AlTi (system on at Danchip anymore)
15:48, 22 January 2018 Bghe talk contribs deleted page Usergroup:DANCHIP (content was: "* BGE" (and the only contributor was "WikiSysop"))
10:05, 20 November 2017 Bghe talk contribs deleted page LabAdviser/Technology Research/Frontier Studies of Metal Thin Films - Deposition and Characterization (content was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/LabAdviser/Technology_R..." (and the only contributor was "Bghe"))