Deletion log

Below is a list of the most recent deletions.

13:59, 26 October 2017 Bghe talk contribs deleted page High resolution patterning with HSQ (content was: "* ''This work was done by Bingdong Chang and Xiaoli Zhu in 2016;'' * ''This page was edited by Bingdong Chang 23 October 2017.'' High resolution patterns (sub-10n..." (and the only contributor was "Bincha"))
13:39, 26 October 2017 Bghe talk contribs deleted page Using OES to monitor etch process (content was: "''* This work was done by Henri Jansen and Bingdong Chang in 2017;'' ''* This page was edited by Bingdong Chang 23 October 2017.'' An optical endpoint detection ..." (and the only contributor was "Bincha"))
13:38, 26 October 2017 Bghe talk contribs deleted page Etch black silicon (content was: "* ''This work was done by Henri Jansen and Bingdong Chang in 2017;'' * ''This page was edited by Bingdong Chang 23 October, 2017.'' Black silicon has a modified ..." (and the only contributor was "Bincha"))
13:37, 26 October 2017 Bghe talk contribs deleted page Etch 3 dimensional silicon microstructures (content was: "* ''This work was done by Henri Jansen and Bingdong Chang in 2017;'' * ''This page was last edited by Bingdong Chang 24 October 2017.'' By combining anisotropic..." (and the only contributor was "Bincha"))
13:35, 26 October 2017 Bghe talk contribs deleted page Etch high aspect ratio silicon microstructures (content was: " By performing a finely tuned process, which is called '''DREM process''' (Deposit, Removal, Etch Method), an infinite etch selectivity can be achieved with convent..." (and the only contributor was "Bincha"))
16:46, 13 September 2017 Jehan talk contribs deleted page File:CleWin5UserGuide.pdf (Deleted old revision 20170913141448!CleWin5UserGuide.pdf: LabAdviser did not get the new file)
09:06, 10 July 2017 Bghe talk contribs deleted page Specific Process Knowledge/Etch/KOH Etch/V-grooves (content was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/KOH_Etch/V-grooves click here]'''")
09:05, 10 July 2017 Bghe talk contribs deleted page Specific Process Knowledge/Lithography/UVExposure/UVExposure dose (content was: "=This page is under construction 70px= =Exposure dose= Image:AZ spectral sensitivity.gif|300x300px|thumb|Spectral sensitiv..." (and the only contributor was "Taran"))
08:41, 29 June 2017 Bghe talk contribs deleted page Specific Process Knowledge/Characterization/SEM FEI Nova 600 NanoSEM/Nova-Gallery (content was: "ARGUS images" (and the only contributor was "Hoal"))
08:30, 29 June 2017 Bghe talk contribs deleted page Specific Process Knowledge/Characterization/SEM FEI Quanta FEG 200 ESEM (content was: "=THIS PAGE IS UNDER CONSTRUCTION200px= '''Feedback to this page''': '''[mailto:labadviser@danch..." (and the only contributor was "Rami"))
08:20, 29 June 2017 Bghe talk contribs deleted page Specific Process Knowledge/Thermal Process/ATV furnace (content was: "=THIS PAGE IS UNDER CONSTRUCTION200px= ==ATV Furnace== '''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http:...")
08:19, 29 June 2017 Bghe talk contribs deleted page Specific Process Knowledge/Thermal Process/Oxidation/wet oxidation C1 furnace (content was: "=THIS PAGE IS UNDER CONSTRUCTION200px= '''Feedback to this page''': '''[mailto:labadviser@..." (and the only contributor was "Paphol"))
11:54, 26 June 2017 Bghe talk contribs deleted page Specific Process Knowledge/Characterization/Profiler/Performance (content was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowle..." (and the only contributor was "Bghe"))
08:34, 29 May 2017 Bghe talk contribs deleted page Specific Process Knowledge/Back-end processing/Laser Micromachining Tool/Optic availability (content before blanking was: " <table border="1" style="text-align:center; background-color: white;""> <tr> <td>Laser</td> <td style="width:15em;color:red">Picosecond & Nanosecond</td> <td style="width:15em;color:green">Picosecond</td> <td ...")
08:34, 29 May 2017 Bghe talk contribs deleted page Specific Process Knowledge/Back-end processing/Laser Micromachining Tool/Aluminium cutting and milling (content before blanking was: "'''Feedback to this page''': '''[mailto:danchipsupport@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=Specific_Process_Knowledge/Back-end_processing/Mask_making click h...")
08:55, 25 April 2017 Bghe talk contribs deleted page Specific Process Knowledge/Back-end processing/Sandblasting (content was: "'''Feedback to this page''': '''[mailto:danchipsupport@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=Specific_Process_Knowledge/Back-end_processing/Sandblasting Click here]''' The ma...")
08:42, 25 April 2017 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Multisource PVD/Acceptance tests PVD co-sputter evaporation (System has been decommissioned)
08:41, 25 April 2017 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of NiV/Sputter rates for NiV PVD co-sputter/evaporation (System has been decommissioned)
16:30, 24 March 2017 Jehan talk contribs deleted page Specific Process Knowledge/Characterization/PL Mapper (duplicate page)
15:27, 13 March 2017 Bghe talk contribs deleted page Specific Process Knowledge/Imprinting/EVG NIL (equipment has been decommissioned)
15:27, 13 March 2017 Bghe talk contribs deleted page Specific Process Knowledge/Bonding/EVG NIL (Equipment has been decommissioned)
15:26, 13 March 2017 Bghe talk contribs deleted page Template:EVG NIL (equipment has been decommissioned)
14:02, 13 March 2017 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Hummer (has been decommissioned)
13:51, 13 March 2017 Bghe talk contribs deleted page Specific Process Knowledge/Lithography/Coaters/SSE Spinner AZ5214e coating (System decommissioned)
13:51, 13 March 2017 Bghe talk contribs deleted page Specific Process Knowledge/Lithography/Coaters/General SSE spinner process information (System decommissioned)
11:13, 13 March 2017 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/ALD Picosun R200/TiN deposition using ALD2 (contect moved to the right page)
11:13, 13 March 2017 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/ALD Picosun R200/AlN deposition using ALD2 (contect moved to the right page)
11:12, 13 March 2017 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/ALD Picosun R200/SiO2 deposition using ALD2 (contect moved to the right page)
11:12, 13 March 2017 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/ALD Picosun R200/HfO2 deposition using ALD2 (contect moved to the right page)
11:12, 13 March 2017 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/ALD Picosun R200/TiO2 deposition using ALD2 (contect moved to the right page)
11:12, 13 March 2017 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/ALD Picosun R200/Al2O3 deposition using ALD2 (contect moved to the right page)
16:22, 3 March 2017 Bghe talk contribs deleted page Specific Process Knowledge/Wafer and sample drying/ (content before blanking was: "==Spin dryers== 200x200px|right|thumb|Image(s) of the equipment(s) A tool used for drying wafers. A single cassette of wafers is placed in a stainless steel rotor. The wafers are c...")
16:59, 2 February 2017 Bghe talk contribs deleted page Specific Process Knowledge/Materials (content was: "=THIS PAGE IS UNDER CONSTRUCTION200px= {| {{table}} | align="left" valign="top" style="backgro..." (and the only contributor was "Bghe"))
16:59, 2 February 2017 Bghe talk contribs deleted page Specific Process Knowledge/III-V Process/characterisation (content was: "==Dektak III-V Profiler== '' - Profiler. '' ==PL Mapper== '' - Photoluminiscence mapping of wafers''")
18:22, 17 January 2017 Jehan talk contribs deleted page Jehan (content was used for testing)
17:35, 3 November 2016 Jehan talk contribs deleted page Specific Process Knowledge/Back-end processing/Borofloat back-end process (content never made)
17:34, 3 November 2016 Jehan talk contribs deleted page Specific Process Knowledge/Back-end processing/Silicon back-end process (content never filled in)
10:25, 30 September 2016 Bghe talk contribs deleted page Specific Process Knowledge/Thin Film deposition/ALD/Standard recipes on the ALD tool (content was: " =THIS PAGE IS UNDER CONSTRUCTION200px= '''Feedback to this page''': '''[mailto:labadviser@dan..." (and the only contributor was "Pevo"))
13:57, 26 September 2016 Bghe talk contribs deleted page Specific Process Knowledge/Thermal Process/A2 Bor Pre-dep furnace (content was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/A2_Bor_Pre-dep_furnace click here]''' ==Boron Pr...")
13:14, 26 September 2016 Bghe talk contribs deleted page Specific Process Knowledge/Characterization/Probe station (content was: "==Probe station== '''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Probe_station click here]''' ...")
14:33, 19 September 2016 Bghe talk contribs deleted page Evacuation info (content was: "'''Please, do not play these sounds in the cleanroom!''' On the two subsites below, it is possible to find the alarm sounds. The sound..." (and the only contributor was "Khara"))
14:33, 19 September 2016 Bghe talk contribs deleted page Evacuation info/hard (content was: "'''Please, do not play these sounds in the cleanroom!''' In case of a hard evacuation, please meet at the entrance to building 358. [..." (and the only contributor was "Khara"))
14:33, 19 September 2016 Bghe talk contribs deleted page Evacuation info/soft (content was: "'''Please, do not play these sounds in the cleanroom!'''  Media:Soft-evacuation.mp3|Soft..." (and the only contributor was "Khara"))
14:29, 19 September 2016 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of Silver/Sputter rates for Ag PVD co-sputter/evaporation (content before blanking was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_Silver/S...")
14:29, 19 September 2016 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of NiCr (content before blanking was: "==This machine will be decommissioned soon. For NiCr co-deposition can be also used the Sputter system (Lesker)== '''Feedback to this page''': '''[mailto:pvd@danchip.dtu.dk?Subject=Feed%20b...")
14:29, 19 September 2016 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of AlTi (content before blanking was: "'''Feedback to this page''': '''[mailto:pvd@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_AlTi&action=edi...")
14:28, 19 September 2016 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Multisource PVD/Cu (content was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=Specific_Process_Knowledge/Thin_film_deposition/Multisource_PVD/Cu click here]''' == ...")
14:28, 19 September 2016 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of Aluminium/Sputter rates for Al PVD co-sputter/evaporation (content was: " == '''Sputter rates Aluminium (DC sputtering)''' == There is a general page concerning different methods of depositing Aluminium at Danchip . == '''Using PVD ...")
14:28, 19 September 2016 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Si sputter in PVD co-sputter/evaporation (content was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=Specific_Process_Knowledge/Thin_film_deposition/Si_sputter_in_PVD_co-sputter/evaporati...")
14:27, 19 September 2016 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of Aluminium Nitride/AlN in PVD co-sputter (content was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=Specific_Proc..." (and the only contributor was "Paphol"))