Deletion log

Below is a list of the most recent deletions.

11:14, 28 May 2015 Bghe talk contribs deleted page Specific Process Knowledge/Etch/IBE/IBSD Ionfab 300 (content before blanking was: "='''THIS PAGE IS UNDER CONSTRUCTION'''= ==IBE/IBSD Ionfab 300: milling, dry etching and deposition in the same tool== IBE: Ion Beam Etch IBSD: Ion Beam Sputter Deposition This Ionfab300 from Oxford Instruments is cab...")
11:11, 28 May 2015 Bghe talk contribs deleted page Advanced Silicon Etcher - Pegasus (content was: "SPTS Pegasus user manual can now be found here >HERE< Here you can find some Information on the new STS Pegasus Si Etcher ..." (and the only contributor was "Roycork"))
11:09, 28 May 2015 Bghe talk contribs deleted page III-V Materials ICP Etcher (content was: "SPTS ICP III-V Materials Etcher user manual can now be found here >HERE< Here you can find some Information on the n..." (and the only contributor was "Roycork"))
11:08, 28 May 2015 Bghe talk contribs deleted page Advanced Metal Etcher (content was: "SPTS ICP Metal Etcher user manual can now be found here >HERE< Here you can find some Information on the new STS ICP Metal..." (and the only contributor was "Roycork"))
10:54, 28 May 2015 Bghe talk contribs deleted page Process Specific Knowledge/Photolithography/AZ5214E diluted positive resist (content before blanking was: "#REDIRECT Specific Process Knowledge/Photolithography/AZ5214E diluted positive resist")
10:53, 28 May 2015 Bghe talk contribs deleted page Specific Process Knowledge/Etch/Etch of Silicon Nitride using RIE (content was: "For a general introduction to RIE at Danchip see RIE (Reactive Ion Etch) Etching of silicon nitride using RIE can be done with several recipes. It can be etched by o..." (and the only contributor was "BGE"))
10:52, 28 May 2015 Bghe talk contribs deleted page Components (content was: "== Components== test")
09:25, 26 May 2015 Jehan talk contribs deleted page File:Lesker 2014 with text2.jpg (Deleted old revision 20150526072319!Lesker_2014_with_text2.jpg: not possible to make thumbnail)
09:25, 26 May 2015 Jehan talk contribs deleted page File:Lesker 2014 with text2.jpg (Deleted old revision 20150526072447!Lesker_2014_with_text2.jpg: not possible to make thumbnail)
11:08, 17 April 2015 Bghe talk contribs deleted page File:AFM Re-training 2015.pdf
12:58, 20 March 2015 Bghe talk contribs deleted page File:Monthly LabAdviser update 20150320.docx
12:58, 20 March 2015 Bghe talk contribs deleted page File:Monthly LabAdviser update 20150320.docx (Deleted old revision 20150320105653!Monthly_LabAdviser_update_20150320.docx)
12:55, 20 March 2015 Bghe talk contribs deleted page File:Monthly LabAdviser update 20150320.docx (Deleted old revision 20150320105257!Monthly_LabAdviser_update_20150320.docx)
12:54, 20 March 2015 Bghe talk contribs deleted page File:Monthly LabAdviser update 20150320.docx (Deleted old revision 20150320105441!Monthly_LabAdviser_update_20150320.docx)
11:46, 25 February 2015 Bghe talk contribs deleted page Specific Process Knowledge/III-V Process (content was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/III-V_Process click here]''' This entry has been merged with ...")
11:43, 25 February 2015 Bghe talk contribs deleted page Specific Process Knowledge/temp (content before blanking was: "==Overview of sample processing 3== {| {{Table}} |- valign="top" | {| class="wikitable collapsible collapsed" border="1" cellspacing="1" cellpadding="2" align="left" ! image:Clean your sample.png|thumb|100px|Clean y...")
15:08, 11 December 2014 Bghe talk contribs deleted page Specific Process Knowledge/III-V Process/characterisation/III-V ECV-profiler (Moved to characterization)
15:03, 11 December 2014 Bghe talk contribs deleted page Specific Process Knowledge/III-V Process/characterisation/X-Ray Diffractometer (Moved to characterization)
12:21, 11 December 2014 Jehan talk contribs deleted page Specific Process Knowledge/Lithography/UVLithography/Mask Design (content was: "==Mask Design== '''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/Mask_Design click here]''' <!-- Unde...")
15:45, 24 November 2014 Bghe talk contribs deleted page Specific Process Knowledge/Thin Film deposition/ALD/Ti2 deposition using ALD (content was: " =THIS PAGE IS UNDER CONSTRUCTION200px=" (and the only contributor was "Eves"))
16:51, 15 October 2014 Bghe talk contribs deleted page Specific Process Knowledge/Lithography/Coaters/Developer TMAH UV-lithography processing (content before blanking was: "= This page is under construction 70px = =General Process Information= Processing using Spin Track 1 + 2 is divided into three parts: *HMDS priming *Spin coating *Soft baking As p...")
15:54, 2 October 2014 Bghe talk contribs deleted page Template:DryEtchComparison (content before blanking was: "== Hardware and option comparison of the dry etchers at Danchip == The table below compares the hardware and the options on the dry etch tools at Danchip. {| border="2" cellspacing="0" cellpadding="0" align="center" ! ...")
15:54, 2 October 2014 Bghe talk contribs deleted page Template:TemporaryBonding (content was: "= Temporary bonding of wafers or chips for dry etching = == Purpose == Many tools are set up for processing one particular size of wafer. The reasons why a tool proce..." (and the only contributor was "Jmli"))
15:54, 2 October 2014 Bghe talk contribs deleted page Template:SEMgallery (content was: "== Images of aluminium on polysilicon == === Purpose === To check if the liftoff process with aluminium on e-beam defined nanostructures is ok. === How to approach the ..." (and the only contributor was "Jml"))
11:31, 1 October 2014 Bghe talk contribs deleted page Specific Process Knowledge/III-V Process/thin film dep/physimeca/Physimeca calibration (content was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_dep/physimeca/Physimeca_calibration click here]''' =...")
11:31, 1 October 2014 Bghe talk contribs deleted page Specific Process Knowledge/III-V Process/characterisation/III V Profiler (content was: "'''Feedback to this page''': '''[mailto:Characterization@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=Specific_Process_Knowledge/III-V_Process/characterisation/III_V_Profiler&action=...")
11:30, 1 October 2014 Bghe talk contribs deleted page Specific Process Knowledge/III-V Process/thin film dep/physimeca (content was: "'''Feedback to this page''': '''[mailto:pvd@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=Specific_Process_Knowledge/III-V_Process/thin_film_dep/physimeca&action=edit click here]''' ...")
11:30, 1 October 2014 Bghe talk contribs deleted page Specific Process Knowledge/III-V Process/thin film dep/III V evaporator (content was: "'''Feedback to this page''': '''[mailto:pvd@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=Specific_Process_Knowledge/III-V_Process/thin_film_dep/III_V_evaporator&action=edit click her...")
13:14, 23 September 2014 Bghe talk contribs deleted page Specific Process Knowledge/Etch/DRIE-Pegasus/Waferloading (content before blanking was: "== Rules as of August 2011 for loading wafers on the Pegasus == Until August 2011 processing at the Pegasus was complicated by frequent losses of wafers during transfer operations. It is evident that the instrument is mu...")
14:41, 25 August 2014 Bghe talk contribs deleted page Specific Process Knowledge/Thermal Process/C2 Gate Oxide furnace (content was: " '''Feedback to this page''': '''[mailto:thinfilm@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/A2_Gate_Oxide_furnace click here]''' Category: ...")
09:00, 22 August 2014 Bghe talk contribs deleted page Specific Process Knowledge/III-V Process/characterisation/PL Mapper (Moved to characterization)
09:15, 1 July 2014 Bghe talk contribs deleted page Specific Process Knowledge/Lithography/WaferCleaning (content was: "'''Feedback to this page''': '''[mailto:photolith@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowl..." (and the only contributor was "Jehem"))
14:30, 19 June 2014 Bghe talk contribs deleted page Specific Process Knowledge/III-V Process/etch/III V ICP (content was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=Specific_Process_Knowledge/III-V_Process/etch/III_V_ICP click here]''' Image:III-VI...")
14:29, 19 June 2014 Bghe talk contribs deleted page Specific Process Knowledge/III-V Process/etch/III V ICP/GaAsnano (content was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowle..." (and the only contributor was "Jmli"))
14:29, 19 June 2014 Bghe talk contribs deleted page Specific Process Knowledge/III-V Process/etch/III V ICP/InP-InGaAsP-InGaAs (content was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowle..." (and the only contributor was "Jmli"))
14:29, 19 June 2014 Bghe talk contribs deleted page Specific Process Knowledge/III-V Process/etch/III V ICP/GaAs-AlGaAs (content was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowle..." (and the only contributor was "Jmli"))
14:29, 19 June 2014 Bghe talk contribs deleted page Specific Process Knowledge/III-V Process/etch/III V ICP/GaN (content was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowle..." (and the only contributor was "Jmli"))
13:41, 19 June 2014 Bghe talk contribs deleted page Specific Process Knowledge/III-V Process/etch/plasys (content was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=Specific_Process_Knowledge/III-V_Process/etch/plasys click here]''' ==III-V RIE Plass...")
13:41, 19 June 2014 Bghe talk contribs deleted page Specific Process Knowledge/III-V Process/etch/plasys/III V RIE ETCHES (content was: "==CHF3/O2 etch== A plasma with a gas mixture of CHF3 and O2 is used to etch SiO2 and Si3Ni4 dielectricas; flour radicals are responsible for etching the dielectrica while oxygen rem...")
08:48, 13 June 2014 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of Silicon Nitride/Deposition of Silicon Nitride using LPCVD (content was: "'''Feedback to this page''': '''[mailto:thinfilm@danchip.dtu.dk?Subject=Feed%20back%20from%20page%http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_Silicon_Nitride/Deposition_of_Sili...")
08:48, 13 June 2014 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of Silicon Nitride/Deposition of Silicon Nitride using LPCVD/Deposition of low stress nitride using the 4" LPCVD nitride furnace (content was: "{{delete | [Side have been moved] }}{{db-g7}} '''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition...")
08:48, 13 June 2014 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of Silicon Nitride/Deposition of Silicon Nitride using LPCVD/Deposition of stoichiometric nitride using the 6" LPCVD nitride furnace (content was: " '''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowled..." (and the only contributor was "Pevo"))
08:47, 13 June 2014 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of Silicon Nitride/Deposition of Silicon Nitride using LPCVD/Using LPCVD silicon nitride as a masking material for KOH etching (content was: "'''Feedback to this page''': '''[mailto:thinfilm@danchip.dtu.dk?Subject=Feed%20back%20from%20page%http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/..." (and the only contributor was "Pevo"))
13:15, 7 May 2014 Bghe talk contribs deleted page Specific Process Knowledge/III-V Process/etch/III V wet etches (content was: "'''Feedback to this page''': '''[mailto:danchipsupport@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://http://labadviser.danchip.dtu.dk/index.php?title=Specific_Process_Knowledge/III-V_Process/etch/III_V_wet_etches click here]'...")
10:41, 6 May 2014 Bghe talk contribs deleted page Specific Process Knowledge/III-V Process/thin film dep/pecvd2 (content was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/III-V_Process/thin_film_dep/pecvd2 click here]''' ==PECVD Plas...")
10:28, 6 May 2014 Bghe talk contribs deleted page Specific Process Knowledge/III-V Process/thin film dep/pecvd2/PECVD2 programs (content was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/III-V_Process/thin_film_dep/pecvd2/PECVD2_programs click here]''...")
13:26, 2 May 2014 Bghe talk contribs deleted page Specific Process Knowledge/Photolithography/masks (content was: "== Danchip quality control masks == This section contains a description of some of the quality control designs. * ASE standisation design */daseferie| ..." (and the only contributor was "Jml"))
13:25, 2 May 2014 Bghe talk contribs deleted page Specific Process Knowledge/Photolithography/masks/travka (content was: "== The Travka mask set == The travka mask set consists of 7 masks: * Travka 05 with L-Edit design file: file:Travka 05.tdb and cif file file:Travka 05.cif * Trav..." (and the only contributor was "Jml"))
13:24, 2 May 2014 Bghe talk contribs deleted page Specific Process Knowledge/Photolithography/masks/daseferie (content was: "== Standardisation design on RIE1 and RIE2 == The quality control procedures on RIE1 and RIE2 are using the dASEfeRIE mask * file:daseferie.pdf | A description of the..." (and the only contributor was "Jml"))
13:23, 2 May 2014 Bghe talk contribs deleted page Specific Process Knowledge/Photolithography/masks/daqmask2 (content was: "== Standardisation design on the ASE == The quality control procedure on the ASE is using the daqmask 2 mask * file:Daqmask2.pdf | A description of the daqmask 2 mask..." (and the only contributor was "Jml"))