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- 09:40, 25 November 2014 Bghe talk contribs uploaded File:Monthly LabAdviser update 20141124.docx
- 15:45, 24 November 2014 Bghe talk contribs deleted page Specific Process Knowledge/Thin Film deposition/ALD/Ti2 deposition using ALD (content was: " =<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>200px=" (and the only contributor was "Eves"))
- 16:06, 4 November 2014 Bghe talk contribs uploaded File:SystemNoise open closed hood.jpg (MsUpload)
- 16:06, 4 November 2014 Bghe talk contribs uploaded File:SystemNoise.jpg (MsUpload)
- 15:01, 4 November 2014 Bghe talk contribs uploaded File:SensorNoise.jpg (MsUpload)
- 14:09, 4 November 2014 Bghe talk contribs uploaded File:AFM Icon KPFM2.jpg (MsUpload)
- 14:09, 4 November 2014 Bghe talk contribs uploaded File:AFM Icon KPFM1.jpg (MsUpload)
- 13:46, 4 November 2014 Bghe talk contribs uploaded a new version of File:200nm wide 400nm deep.jpg
- 13:43, 4 November 2014 Bghe talk contribs uploaded File:200nm wide 400nm deep.jpg (MsUpload)
- 10:46, 24 October 2014 Bghe talk contribs uploaded File:Monthly LabAdviser update 20141001.docx (MsUpload)
- 10:43, 24 October 2014 Bghe talk contribs uploaded File:Monthly LabAdviser update 20141024.docx (MsUpload)
- 10:15, 24 October 2014 Bghe talk contribs uploaded File:P6180008.JPG (MsUpload)
- 07:51, 24 October 2014 Bghe talk contribs uploaded File:ACPT roughness.jpg (MsUpload)
- 16:51, 15 October 2014 Bghe talk contribs deleted page Specific Process Knowledge/Lithography/Coaters/Developer TMAH UV-lithography processing (content before blanking was: "= This page is under construction 70px = =General Process Information= Processing using Spin Track 1 + 2 is divided into three parts: *HMDS priming *Spin coating *Soft baking As p...")
- 15:54, 2 October 2014 Bghe talk contribs deleted page Template:DryEtchComparison (content before blanking was: "== Hardware and option comparison of the dry etchers at Danchip == The table below compares the hardware and the options on the dry etch tools at Danchip. {| border="2" cellspacing="0" cellpadding="0" align="center" ! ...")
- 15:54, 2 October 2014 Bghe talk contribs deleted page Template:TemporaryBonding (content was: "= Temporary bonding of wafers or chips for dry etching = == Purpose == Many tools are set up for processing one particular size of wafer. The reasons why a tool proce..." (and the only contributor was "Jmli"))
- 15:54, 2 October 2014 Bghe talk contribs deleted page Template:SEMgallery (content was: "== Images of aluminium on polysilicon == === Purpose === To check if the liftoff process with aluminium on e-beam defined nanostructures is ok. === How to approach the ..." (and the only contributor was "Jml"))
- 11:31, 1 October 2014 Bghe talk contribs deleted page Specific Process Knowledge/III-V Process/thin film dep/physimeca/Physimeca calibration (content was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_dep/physimeca/Physimeca_calibration click here]''' =...")
- 11:31, 1 October 2014 Bghe talk contribs deleted page Specific Process Knowledge/III-V Process/characterisation/III V Profiler (content was: "'''Feedback to this page''': '''[mailto:Characterization@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=Specific_Process_Knowledge/III-V_Process/characterisation/III_V_Profiler&action=...")
- 11:30, 1 October 2014 Bghe talk contribs deleted page Specific Process Knowledge/III-V Process/thin film dep/physimeca (content was: "'''Feedback to this page''': '''[mailto:pvd@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=Specific_Process_Knowledge/III-V_Process/thin_film_dep/physimeca&action=edit click here]''' ...")
- 11:30, 1 October 2014 Bghe talk contribs deleted page Specific Process Knowledge/III-V Process/thin film dep/III V evaporator (content was: "'''Feedback to this page''': '''[mailto:pvd@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=Specific_Process_Knowledge/III-V_Process/thin_film_dep/III_V_evaporator&action=edit click her...")
- 13:14, 23 September 2014 Bghe talk contribs deleted page Specific Process Knowledge/Etch/DRIE-Pegasus/Waferloading (content before blanking was: "== Rules as of August 2011 for loading wafers on the Pegasus == Until August 2011 processing at the Pegasus was complicated by frequent losses of wafers during transfer operations. It is evident that the instrument is mu...")
- 10:37, 5 September 2014 Bghe talk contribs uploaded File:Monthly LabAdviser update 20140905.docx
- 14:41, 25 August 2014 Bghe talk contribs deleted page Specific Process Knowledge/Thermal Process/C2 Gate Oxide furnace (content was: " '''Feedback to this page''': '''[mailto:thinfilm@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/A2_Gate_Oxide_furnace click here]''' Category: ...")
- 09:00, 22 August 2014 Bghe talk contribs deleted page Specific Process Knowledge/III-V Process/characterisation/PL Mapper (Moved to characterization)
- 12:00, 14 August 2014 Bghe talk contribs uploaded File:PECVD2 RI vs B-P graph.jpg
- 15:33, 1 August 2014 Bghe talk contribs uploaded File:Monthly LabAdviser update 20140801.docx
- 09:15, 1 July 2014 Bghe talk contribs deleted page Specific Process Knowledge/Lithography/WaferCleaning (content was: "'''Feedback to this page''': '''[mailto:photolith@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowl..." (and the only contributor was "Jehem"))
- 14:30, 19 June 2014 Bghe talk contribs deleted page Specific Process Knowledge/III-V Process/etch/III V ICP (content was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=Specific_Process_Knowledge/III-V_Process/etch/III_V_ICP click here]''' Image:III-VI...")
- 14:29, 19 June 2014 Bghe talk contribs deleted page Specific Process Knowledge/III-V Process/etch/III V ICP/GaAsnano (content was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowle..." (and the only contributor was "Jmli"))
- 14:29, 19 June 2014 Bghe talk contribs deleted page Specific Process Knowledge/III-V Process/etch/III V ICP/InP-InGaAsP-InGaAs (content was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowle..." (and the only contributor was "Jmli"))
- 14:29, 19 June 2014 Bghe talk contribs deleted page Specific Process Knowledge/III-V Process/etch/III V ICP/GaAs-AlGaAs (content was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowle..." (and the only contributor was "Jmli"))
- 14:29, 19 June 2014 Bghe talk contribs deleted page Specific Process Knowledge/III-V Process/etch/III V ICP/GaN (content was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowle..." (and the only contributor was "Jmli"))
- 13:41, 19 June 2014 Bghe talk contribs deleted page Specific Process Knowledge/III-V Process/etch/plasys (content was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=Specific_Process_Knowledge/III-V_Process/etch/plasys click here]''' ==III-V RIE Plass...")
- 13:41, 19 June 2014 Bghe talk contribs deleted page Specific Process Knowledge/III-V Process/etch/plasys/III V RIE ETCHES (content was: "==CHF3/O2 etch== A plasma with a gas mixture of CHF<sub>3</sub> and O<sub>2</sub> is used to etch SiO<sub>2</sub> and Si<sub>3</sub>Ni<sub>4</sub> dielectricas; flour radicals are responsible for etching the dielectrica while oxygen rem...")
- 08:48, 13 June 2014 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of Silicon Nitride/Deposition of Silicon Nitride using LPCVD (content was: "'''Feedback to this page''': '''[mailto:thinfilm@danchip.dtu.dk?Subject=Feed%20back%20from%20page%http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_Silicon_Nitride/Deposition_of_Sili...")
- 08:48, 13 June 2014 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of Silicon Nitride/Deposition of Silicon Nitride using LPCVD/Deposition of low stress nitride using the 4" LPCVD nitride furnace (content was: "{{delete | [Side have been moved] }}{{db-g7}} '''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition...")
- 08:48, 13 June 2014 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of Silicon Nitride/Deposition of Silicon Nitride using LPCVD/Deposition of stoichiometric nitride using the 6" LPCVD nitride furnace (content was: " '''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowled..." (and the only contributor was "Pevo"))
- 08:47, 13 June 2014 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of Silicon Nitride/Deposition of Silicon Nitride using LPCVD/Using LPCVD silicon nitride as a masking material for KOH etching (content was: "'''Feedback to this page''': '''[mailto:thinfilm@danchip.dtu.dk?Subject=Feed%20back%20from%20page%http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/..." (and the only contributor was "Pevo"))
- 15:55, 27 May 2014 Bghe talk contribs uploaded File:Making a mask 1.jpg (MsUpload)
- 15:46, 27 May 2014 Bghe talk contribs uploaded File:Thermal treatment 1.jpg (MsUpload)
- 15:40, 27 May 2014 Bghe talk contribs uploaded File:Making a layer 1.jpg (MsUpload)
- 15:33, 27 May 2014 Bghe talk contribs uploaded File:Drying.jpg (MsUpload)
- 15:33, 27 May 2014 Bghe talk contribs uploaded File:Cleaning.jpg (MsUpload)
- 14:53, 9 May 2014 Bghe talk contribs uploaded File:Monthly LabAdviser update 20140509.docx
- 13:15, 7 May 2014 Bghe talk contribs deleted page Specific Process Knowledge/III-V Process/etch/III V wet etches (content was: "'''Feedback to this page''': '''[mailto:danchipsupport@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://http://labadviser.danchip.dtu.dk/index.php?title=Specific_Process_Knowledge/III-V_Process/etch/III_V_wet_etches click here]'...")
- 10:41, 6 May 2014 Bghe talk contribs deleted page Specific Process Knowledge/III-V Process/thin film dep/pecvd2 (content was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/III-V_Process/thin_film_dep/pecvd2 click here]''' ==PECVD Plas...")
- 10:28, 6 May 2014 Bghe talk contribs deleted page Specific Process Knowledge/III-V Process/thin film dep/pecvd2/PECVD2 programs (content was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/III-V_Process/thin_film_dep/pecvd2/PECVD2_programs click here]''...")
- 13:26, 2 May 2014 Bghe talk contribs deleted page Specific Process Knowledge/Photolithography/masks (content was: "== Danchip quality control masks == This section contains a description of some of the quality control designs. * ASE standisation design */daseferie| ..." (and the only contributor was "Jml"))
- 13:25, 2 May 2014 Bghe talk contribs deleted page Specific Process Knowledge/Photolithography/masks/travka (content was: "== The Travka mask set == The travka mask set consists of 7 masks: * Travka 05 with L-Edit design file: file:Travka 05.tdb and cif file file:Travka 05.cif * Trav..." (and the only contributor was "Jml"))