Upload log
Below is a list of the most recent file uploads. See the gallery of new files for a more visual overview.
- 10:26, 12 March 2010 Roycork talk contribs uploaded File:III-V Materials ICP etcher.pdf
- 10:16, 12 March 2010 Roycork talk contribs uploaded File:SPTS ICP Metal Etcher.pdf
- 10:00, 12 March 2010 Roycork talk contribs uploaded File:SPTS Pegasus user manual.pdf
- 09:53, 12 March 2010 Roycork talk contribs uploaded File:MACS Operator's Manual V2.2.pdf (Manual for Pegasus)
- 17:25, 17 February 2010 Kn talk contribs uploaded File:SiN cantilever dried CPD nr7.jpg (For CPD page: SiN cantilever dryed in Critical Point Dryer. Picture from Tom Larsen, Nanoprobes.)
- 17:21, 17 February 2010 Kn talk contribs uploaded File:SiN cantilever dried CPD.jpg (For CPD page: SiN cantilever dried in Critcal point dryer. Picture from Tom Larsen, Nanoprobes.)
- 17:06, 17 February 2010 Kn talk contribs uploaded File:SiN dried air.jpg (For CPD page: SiN cantilever dryed in air. Picture from Tom Larsen, Nanoprobes.)
- 16:50, 17 February 2010 Kn talk contribs uploaded File:SiN cantilever dryed air.ppt (For CPD page: SiN cantilever dryed in air. Picture from Tom Larsen, Nanoprobes.)
- 15:25, 17 February 2010 Kn talk contribs uploaded File:CPD.JPG (Picture of the Critical Point Dryer.)
- 11:09, 22 December 2009 Elk talk contribs uploaded File:Nonconfirmity Support note 0001.pdf
- 11:02, 22 December 2009 Elk talk contribs uploaded File:Nonconformity support note 0001.pdf (Defect free spinning of MR-i7030 resist with SSE Spinner Maximus.)
- 09:30, 22 December 2009 Elk talk contribs uploaded File:KS Spinner extract box.png (Extract box for SU8/unbaked wafers.)
- 13:06, 30 November 2009 Roycork talk contribs uploaded File:Pegasus System Description & Differentiation.pdf (The advantages the pegasus has over our existing etchers)
- 13:03, 30 November 2009 Roycork talk contribs uploaded File:Pegasus specification v2.4.pdf (Detailed hardware info pegasus)
- 12:49, 30 November 2009 Roycork talk contribs uploaded File:Appl-sheets-4 markets.pdf (Pegasus process doc)
- 12:47, 30 November 2009 Roycork talk contribs uploaded File:Packaging-etch.pdf (Pegasus process doc)
- 12:46, 30 November 2009 Roycork talk contribs uploaded File:Nanotechnology.pdf (Pegasus process doc)
- 12:45, 30 November 2009 Roycork talk contribs uploaded File:Energy.pdf (Pegasus process doc)
- 12:44, 30 November 2009 Roycork talk contribs uploaded File:Bio-medical.pdf (Pegasus process doc)
- 12:39, 30 November 2009 Roycork talk contribs uploaded File:Macs v2.pdf (Robot handling system for the pegasus)
- 12:32, 30 November 2009 Roycork talk contribs uploaded File:Aerospace.pdf (Process info Pegasus)
- 12:30, 30 November 2009 Roycork talk contribs uploaded File:Pegasus sheet V8.pdf (Hardware Info STS pegasus si etcher)
- 12:28, 30 November 2009 Roycork talk contribs uploaded a new version of File:STS pegasus.JPG (Pegasus Si etcher at sts factory)
- 12:26, 30 November 2009 Roycork talk contribs uploaded File:STS pegasus.JPG (As pictured st sts factory)
- 12:12, 30 November 2009 Roycork talk contribs uploaded File:Metal etcher.jpg (picture from sts factory)
- 12:08, 30 November 2009 Roycork talk contribs uploaded File:Al-etch.pdf (STS sales info Al etch in metal etcher)
- 11:36, 30 November 2009 Roycork talk contribs uploaded File:Advanced Metal Etcher.pdf (Sales Info on STS icp metal etcher)
- 11:20, 30 November 2009 Roycork talk contribs uploaded File:Metal Etch.pdf (Sales info on sts metal etcher)
- 15:45, 25 November 2009 Ajoe talk contribs uploaded File:Square silica on 200 mm wafer comp.JPG (This is a photograph of a trial substrate bonded to a 200 mm round wafer using CrystalBond.)
- 15:20, 9 November 2009 BGE talk contribs uploaded File:Lesker Impedance Bjarke.png
- 14:56, 9 November 2009 BGE talk contribs uploaded File:Lesker roughness Bjarke.JPG
- 11:37, 21 September 2009 Pvl talk contribs uploaded File:Bc 5 7 jpeg.jpg (RIE1 etch profile - 150 nm silicon nitride - recipe "BGE_NITR" (pressure 42 mTorr) - etchtime 3,5 min. The structures are made with e-beam lithography, and the Al etch mask has been removed. Wafer tiltet 45 degrees.)
- 11:35, 21 September 2009 Pvl talk contribs uploaded a new version of File:RIE1 150nitride bgenitr 3.5min.tif (RIE1 etch profile - 150 nm silicon nitride - recipe "BGE_NITR" (pressure 42 mTorr) - etchtime 3,5 min. The structures are made with e-beam lithography, and the Al etch mask has been removed. Wafer tiltet 45 degrees.)
- 11:24, 21 September 2009 Pvl talk contribs uploaded a new version of File:RIE1 150nitride bgenitr 3.5min.tif (RIE1 etch profile - 150 nm silicon nitride - recipe "BGE_NITR" (pressure 42 mTorr) - etchtime 3,5 min. The structures are made with e-beam lithography, and the Al etch mask has been removed. Wafer tiltet 45 degrees.)
- 11:17, 21 September 2009 Pvl talk contribs uploaded a new version of File:RIE1 150nitride bgenitr 3.5min.tif (RIE1 etch profile - 150 nm silicon nitride - recipe "BGE_NITR" (pressure 42 mTorr) - etchtime 3,5 min. The structures are made with e-beam lithography, and the Al etch mask has been removed. Wafer tiltet 45 degrees.)
- 17:05, 18 September 2009 Jml talk contribs uploaded File:Lor data sheet.pdf (Data sheet for LOR resist)
- 15:31, 18 September 2009 Jml talk contribs uploaded File:Processing Procedures for Dry-Etch CYCLOTENE.pdf (A description of the processing procedures for BCB)
- 16:03, 7 September 2009 Pvl talk contribs uploaded File:RIE1 150nitride bgenitr 3.5min.tif (RIE1 etch profile - 150 nm silicon nitride - recipe "BGE_NITR" (pressure 42 mTorr) - etchtime 3,5 min. The structures are made with e-beam lithography, and the Al etch mask has been removed. Wafer tiltet 45 degrees.)
- 13:35, 6 July 2009 Pvl talk contribs uploaded File:DC nyhed 6.jpg (6'' nitride furnace)
- 13:35, 6 July 2009 Pvl talk contribs uploaded File:DC nyhed 3.jpg (6'' nitride furnace )
- 11:45, 30 June 2009 Elk talk contribs uploaded File:Spinning curves.xls
- 11:43, 30 June 2009 Elk talk contribs uploaded File:Spinnings curves.xls (Spinning curves for SU8 2002 and 2005 on KS Spinner.)
- 10:34, 19 May 2009 BGE talk contribs uploaded File:BGE AOEpsi3 25min no2.jpg
- 10:34, 19 May 2009 BGE talk contribs uploaded File:BGE AOEpsi3 25min no1.jpg
- 15:37, 21 April 2009 BGE talk contribs uploaded File:PNU RIE1 20090416 modified 1sio2msi mpoly no1.jpg
- 15:37, 21 April 2009 BGE talk contribs uploaded File:PNU RIE1 20090416 modified 1sio2msi mpoly no2.jpg
- 15:26, 21 April 2009 BGE talk contribs uploaded File:PNU RIE1 20090416 1sio2msi mpoly no2.jpg
- 15:26, 21 April 2009 BGE talk contribs uploaded File:PNU RIE1 20090416 1sio2msi mpoly no1.jpg
- 15:10, 21 April 2009 BGE talk contribs uploaded File:BGE RIE1 pre2004 1sio2mbr mbr no1.jpg
- 15:01, 21 April 2009 BGE talk contribs uploaded File:PNU RIE1 20090416 1sio2mbr mpoly no2.jpg
