Upload log

Below is a list of the most recent file uploads. See the gallery of new files for a more visual overview.

• 12:30, 30 November 2009 Roycork talk contribs uploaded File:Pegasus sheet V8.pdf (Hardware Info STS pegasus si etcher)
• 12:28, 30 November 2009 Roycork talk contribs uploaded a new version of File:STS pegasus.JPG (Pegasus Si etcher at sts factory)
• 12:26, 30 November 2009 Roycork talk contribs uploaded File:STS pegasus.JPG (As pictured st sts factory)
• 12:12, 30 November 2009 Roycork talk contribs uploaded File:Metal etcher.jpg (picture from sts factory)
• 12:08, 30 November 2009 Roycork talk contribs uploaded File:Al-etch.pdf (STS sales info Al etch in metal etcher)
• 11:36, 30 November 2009 Roycork talk contribs uploaded File:Advanced Metal Etcher.pdf (Sales Info on STS icp metal etcher)
• 11:20, 30 November 2009 Roycork talk contribs uploaded File:Metal Etch.pdf (Sales info on sts metal etcher)
• 15:45, 25 November 2009 Ajoe talk contribs uploaded File:Square silica on 200 mm wafer comp.JPG (This is a photograph of a trial substrate bonded to a 200 mm round wafer using CrystalBond.)
• 15:20, 9 November 2009 BGE talk contribs uploaded File:Lesker Impedance Bjarke.png
• 14:56, 9 November 2009 BGE talk contribs uploaded File:Lesker roughness Bjarke.JPG
• 11:37, 21 September 2009 Pvl talk contribs uploaded File:Bc 5 7 jpeg.jpg (RIE1 etch profile - 150 nm silicon nitride - recipe "BGE_NITR" (pressure 42 mTorr) - etchtime 3,5 min. The structures are made with e-beam lithography, and the Al etch mask has been removed. Wafer tiltet 45 degrees.)
• 11:35, 21 September 2009 Pvl talk contribs uploaded a new version of File:RIE1 150nitride bgenitr 3.5min.tif (RIE1 etch profile - 150 nm silicon nitride - recipe "BGE_NITR" (pressure 42 mTorr) - etchtime 3,5 min. The structures are made with e-beam lithography, and the Al etch mask has been removed. Wafer tiltet 45 degrees.)
• 11:24, 21 September 2009 Pvl talk contribs uploaded a new version of File:RIE1 150nitride bgenitr 3.5min.tif (RIE1 etch profile - 150 nm silicon nitride - recipe "BGE_NITR" (pressure 42 mTorr) - etchtime 3,5 min. The structures are made with e-beam lithography, and the Al etch mask has been removed. Wafer tiltet 45 degrees.)
• 11:17, 21 September 2009 Pvl talk contribs uploaded a new version of File:RIE1 150nitride bgenitr 3.5min.tif (RIE1 etch profile - 150 nm silicon nitride - recipe "BGE_NITR" (pressure 42 mTorr) - etchtime 3,5 min. The structures are made with e-beam lithography, and the Al etch mask has been removed. Wafer tiltet 45 degrees.)
• 17:05, 18 September 2009 Jml talk contribs uploaded File:Lor data sheet.pdf (Data sheet for LOR resist)
• 15:31, 18 September 2009 Jml talk contribs uploaded File:Processing Procedures for Dry-Etch CYCLOTENE.pdf (A description of the processing procedures for BCB)
• 16:03, 7 September 2009 Pvl talk contribs uploaded File:RIE1 150nitride bgenitr 3.5min.tif (RIE1 etch profile - 150 nm silicon nitride - recipe "BGE_NITR" (pressure 42 mTorr) - etchtime 3,5 min. The structures are made with e-beam lithography, and the Al etch mask has been removed. Wafer tiltet 45 degrees.)
• 13:35, 6 July 2009 Pvl talk contribs uploaded File:DC nyhed 6.jpg (6'' nitride furnace)
• 13:35, 6 July 2009 Pvl talk contribs uploaded File:DC nyhed 3.jpg (6'' nitride furnace )
• 11:45, 30 June 2009 Elk talk contribs uploaded File:Spinning curves.xls
• 11:43, 30 June 2009 Elk talk contribs uploaded File:Spinnings curves.xls (Spinning curves for SU8 2002 and 2005 on KS Spinner.)
• 10:34, 19 May 2009 BGE talk contribs uploaded File:BGE AOEpsi3 25min no2.jpg
• 10:34, 19 May 2009 BGE talk contribs uploaded File:BGE AOEpsi3 25min no1.jpg
• 15:37, 21 April 2009 BGE talk contribs uploaded File:PNU RIE1 20090416 modified 1sio2msi mpoly no1.jpg
• 15:37, 21 April 2009 BGE talk contribs uploaded File:PNU RIE1 20090416 modified 1sio2msi mpoly no2.jpg
• 15:26, 21 April 2009 BGE talk contribs uploaded File:PNU RIE1 20090416 1sio2msi mpoly no2.jpg
• 15:26, 21 April 2009 BGE talk contribs uploaded File:PNU RIE1 20090416 1sio2msi mpoly no1.jpg
• 15:10, 21 April 2009 BGE talk contribs uploaded File:BGE RIE1 pre2004 1sio2mbr mbr no1.jpg
• 15:01, 21 April 2009 BGE talk contribs uploaded File:PNU RIE1 20090416 1sio2mbr mpoly no2.jpg
• 15:00, 21 April 2009 BGE talk contribs uploaded File:PNU RIE1 20090416 1sio2mbr mpoly.jpg
• 14:56, 21 April 2009 BGE talk contribs uploaded File:PNU RIE1 20090416 1sio2mbr 4,5µm mpoly.jpg
• 14:55, 21 April 2009 BGE talk contribs uploaded a new version of File:PNU RIE1 20090416 1sio2mbr 9µm mpoly.jpg
• 14:54, 21 April 2009 BGE talk contribs uploaded a new version of File:PNU RIE1 20090416 1sio2mbr 9µm mpoly.jpg
• 14:53, 21 April 2009 BGE talk contribs uploaded File:PNU RIE1 20090416 1sio2mbr 9µm mpoly.jpg
• 12:43, 16 April 2009 BGE talk contribs uploaded File:BGE AOE 20090126 mresist 15min.jpg
• 12:10, 16 April 2009 BGE talk contribs uploaded File:PNU AOE 20090416 no2.jpg
• 12:09, 16 April 2009 BGE talk contribs uploaded File:PNU AOE 20090416 no1.jpg
• 13:52, 5 February 2009 Jml talk contribs uploaded File:UnCoatedBlockCopolymer-2f.jpg (SEM FEI LoVac image of a block copolymer: Sixth single scan of specific area.)
• 13:51, 5 February 2009 Jml talk contribs uploaded File:UnCoatedBlockCopolymer-2e.jpg (SEM FEI LoVac image of a block copolymer: Fifth single scan of specific area.)
• 13:51, 5 February 2009 Jml talk contribs uploaded File:UnCoatedBlockCopolymer-2d.jpg (SEM FEI LoVac image of a block copolymer: Fourth single scan of specific area.)
• 13:50, 5 February 2009 Jml talk contribs uploaded File:UnCoatedBlockCopolymer-2c.jpg (SEM FEI LoVac image of a block copolymer: Third single scan of specific area.)
• 13:50, 5 February 2009 Jml talk contribs uploaded File:UnCoatedBlockCopolymer-2b.jpg (SEM FEI LoVac image of a block copolymer: Second single scan of specific area.)
• 13:49, 5 February 2009 Jml talk contribs uploaded File:UnCoatedBlockCopolymer-2a.jpg (SEM FEI LoVac image of a block copolymer: First single scan of specific area)
• 16:33, 3 February 2009 Jml talk contribs uploaded File:UnCoatedBlockCopolymer-1.jpg (SEM FEI LoVac image of a block copolymer.)
• 16:32, 3 February 2009 Jml talk contribs uploaded File:CoatedBlockCopolymer.jpg (SEM FEI HiVac TLD image of a coated block copolymer.)
• 14:32, 29 January 2009 Elk talk contribs uploaded File:Opskrifter AZ4562.xls (Recipe for AZ4562 for SSE-Maximus.)
• 14:23, 29 January 2009 Elk talk contribs uploaded File:Opskrifter tyk resist.xls (Recipe for AZ4562 resist for KS Spiner.)
• 15:21, 28 January 2009 Elk talk contribs uploaded File:ZEP520A.xls (Spinning curves for ZEP520A.)
• 15:42, 26 January 2009 Rkc talk contribs uploaded File:Teos2.JPG (SEM picture of TEOS in Si trench )
• 15:13, 26 January 2009 Rkc talk contribs uploaded File:Teos1.jpg (TEOS structure)