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- 11:29, 13 August 2025 Paphol talk contribs created page File:Comparing Takano and SurfScan.pptx (Comparing the scanning results from Takano tool and Surfscan)
- 11:29, 13 August 2025 Paphol talk contribs uploaded File:Comparing Takano and SurfScan.pptx (Comparing the scanning results from Takano tool and Surfscan)
- 10:37, 13 August 2025 Prakus talk contribs created page Specific Process Knowledge/Back-end processing/Wire Bonder/new page name (Created page with "'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/Pegasus-4/Silicon_Nitride_Etch click here]''' =<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>200px= TPT HB100 wire bonder comes with wires and tools and has option for mounting Gold wire (dia.: 25µm) or Aluminum wire...")
- 16:31, 12 August 2025 User account S234607 talk contribs was created automatically
- 16:03, 12 August 2025 User account Emilzul talk contribs was created automatically
- 16:32, 11 August 2025 User account Runku talk contribs was created automatically
- 15:21, 11 August 2025 User account S232297 talk contribs was created automatically
- 15:23, 9 August 2025 Mmat talk contribs deleted page Small MATLAB script (content was: "Content moved, please <b>delete</b> this page!")
- 14:37, 9 August 2025 Mmat talk contribs deleted page Specific Process Knowledge/Thermal Process/RTP ANNEALSYS (duplicate, there's another page with more or less same name and actual content)
- 23:18, 7 August 2025 User account S245422 talk contribs was created automatically
- 14:33, 7 August 2025 User account S242670 talk contribs was created automatically
- 23:30, 6 August 2025 User account S246830 talk contribs was created automatically
- 21:55, 6 August 2025 User account S250825 talk contribs was created automatically
- 14:29, 5 August 2025 User account Filipni talk contribs was created automatically
- 16:26, 1 August 2025 User account Loivan talk contribs was created automatically
- 19:07, 30 July 2025 Eves talk contribs created page File:Eves TaN XRR rawta ft may 2025.png (File uploaded with MsUpload)
- 19:07, 30 July 2025 Eves talk contribs uploaded File:Eves TaN XRR rawta ft may 2025.png (File uploaded with MsUpload)
- 19:07, 30 July 2025 Eves talk contribs created page File:Eves TaN GiXRD rawta ft may 2025.png (File uploaded with MsUpload)
- 19:07, 30 July 2025 Eves talk contribs uploaded File:Eves TaN GiXRD rawta ft may 2025.png (File uploaded with MsUpload)
- 19:06, 30 July 2025 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of Tantalum Nitride/TaN Reactive Sputtering in Cluster Lesker PC3 (Created page with "<i>This page is written by <b>Evgeniy Shkondin @DTU Nanolab</b> if nothing else is stated. <br> All images and photos on this page belongs to <b>DTU Nanolab</b>.<br> The fabrication and characterization described below were conducted in <b>2025 by Rawa Tanta</b> and <b>Evgeniy Shkondin, DTU Nanolab</b>.<br></i> This page presents the results of TaN deposition using Reactive p-DC sputtering in Sputter-System Metal-Nitride(PC3), now commonly known as "Cluster Lesker". Th...")
- 19:02, 30 July 2025 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of Tantalum Nitride (Created page with "{{cc-nanolab}} '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_Tantalum_Nitride&action=submit click here]''' =Tantalum Nitride (TaN<sub>x</sub>)= Tungsten nitride (WNₓ, commonly W₂N or δ‑WN) is a refractory ceramic that combines very high melting temperature, extreme hardness, chemical inertness,...")
- 18:47, 30 July 2025 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of Tungsten Nitride/WN Reactive Sputtering in Cluster Lesker PC3 (Created page with "<i>This page is written by <b>Evgeniy Shkondin @DTU Nanolab</b> if nothing else is stated. <br> All images and photos on this page belongs to <b>DTU Nanolab</b>.<br> The fabrication and characterization described below were conducted in <b>2025 by Rawa Tanta</b> and <b>Evgeniy Shkondin, DTU Nanolab</b>.<br></i> This page presents the results of WN<sub>x</sub> deposition using Reactive p-DC sputtering in Sputter-System Metal-Nitride(PC3), now commonly known as "Cluster...")
- 18:47, 30 July 2025 Eves talk contribs created page File:Eves WN XRR rawta ft may 2025.png (File uploaded with MsUpload)
- 18:47, 30 July 2025 Eves talk contribs uploaded File:Eves WN XRR rawta ft may 2025.png (File uploaded with MsUpload)
- 18:47, 30 July 2025 Eves talk contribs created page File:Eves WN GiXRD rawta ft may 2025.png (File uploaded with MsUpload)
- 18:47, 30 July 2025 Eves talk contribs uploaded File:Eves WN GiXRD rawta ft may 2025.png (File uploaded with MsUpload)
- 18:42, 30 July 2025 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of Tungsten Nitride (Created page with "{{cc-nanolab}} '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_Scandium_Nitride&action=submit click here]''' =Tungsten Nitride (WN<sub>x</sub>)= Scandium nitride (ScN) is a rocksalt‑structure semiconductor with an indirect bandgap near 0.9 eV and a direct transition around 2.1 eV, combining high...")
- 18:31, 30 July 2025 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of NbTi/Deposition of NbTi in Sputter-System Metal-Nitride PC3 (Created page with "'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_NbTi/Deposition_of_NbTi_in_Sputter-System_Metal-Nitride_PC3 click here]''' <i>This page is written by <b>Evgeniy Shkondin @DTU Nanolab</b> if nothing else is stated. <br> All images and photos on this page belongs to <b>DTU Nanolab</b>.<br> The fabrication and chara...")
- 18:16, 30 July 2025 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of NbTi/Deposition of NbTi in Sputter-System Metal-Nitride PC3/ (Created page with "<i>This page is written by <b>Evgeniy Shkondin @DTU Nanolab</b> if nothing else is stated. <br> All images and photos on this page belongs to <b>DTU Nanolab</b>.<br> The fabrication and characterization described below were conducted in <b>2025 by Rawa Tanta</b> and <b>Evgeniy Shkondin, DTU Nanolab</b>.<br></i> This page presents the results of NbTi deposition using DC sputtering in Sputter-System Metal-Nitride(PC3), now commonly known as "Cluster Lesker". The depositi...")
- 18:13, 30 July 2025 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of NbTi (Created page with "=Niobium Nitride= Niobium–titanium (Nb‑Ti) is a ductile, readily machinable alloy that merges niobium’s superconductivity with titanium’s strength, yielding a rigid, corrosion‑resistant material valued in cryogenic and high‑field environments. Thin films are produced chiefly by magnetron sputtering, where the Nb/Ti ratio and post‑anneal determine phase purity, resistivity, and the superconducting critical temperature (≈ 9.2 K for near‑eutectic co...")
- 18:12, 30 July 2025 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Depositionof NbTi/Deposition of NbTi in Sputter-System Metal-Nitride PC3/ (Created page with "<i>This page is written by <b>Evgeniy Shkondin @DTU Nanolab</b> if nothing else is stated. <br> All images and photos on this page belongs to <b>DTU Nanolab</b>.<br> The fabrication and characterization described below were conducted in <b>2025 by Rawa Tanta</b> and <b>Evgeniy Shkondin, DTU Nanolab</b>.<br></i> This page presents the results of NbTi deposition using DC sputtering in Sputter-System Metal-Nitride(PC3), now commonly known as "Cluster Lesker". The depositi...")
- 18:08, 30 July 2025 Eves talk contribs created page File:Eves NbTi GiXRD rawta ft may 2025.png (File uploaded with MsUpload)
- 18:08, 30 July 2025 Eves talk contribs uploaded File:Eves NbTi GiXRD rawta ft may 2025.png (File uploaded with MsUpload)
- 18:08, 30 July 2025 Eves talk contribs created page File:Eves NbTi XRR rawta ft may 2025.png (File uploaded with MsUpload)
- 18:08, 30 July 2025 Eves talk contribs uploaded File:Eves NbTi XRR rawta ft may 2025.png (File uploaded with MsUpload)
- 18:08, 30 July 2025 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Depositionof NbTi in Sputter-System Metal-Nitride PC3/ (Created page with "<i>This page is written by <b>Evgeniy Shkondin @DTU Nanolab</b> if nothing else is stated. <br> All images and photos on this page belongs to <b>DTU Nanolab</b>.<br> The fabrication and characterization described below were conducted in <b>2025 by Rawa Tanta</b> and <b>Evgeniy Shkondin, DTU Nanolab</b>.<br></i> This page presents the results of NbTi deposition using DC sputtering in Sputter-System Metal-Nitride(PC3), now commonly known as "Cluster Lesker". The depositi...")
- 17:59, 30 July 2025 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Depositionof NbTi (Created page with "==Comparison of LPCVD, PECVD, and sputter systems for silicon nitride deposition== {|border="1" cellspacing="1" cellpadding="3" style="text-align:left;" |- |- |-style="background:silver; color:black" ! !Sputter-System Metal-Nitride(PC3) !Lesker sputter system |- |- |-style="background:White...")
- 17:52, 30 July 2025 Eves talk contribs created page File:Eves NbTiN XRR rawta ft may 2025.png (File uploaded with MsUpload)
- 17:52, 30 July 2025 Eves talk contribs uploaded File:Eves NbTiN XRR rawta ft may 2025.png (File uploaded with MsUpload)
- 17:52, 30 July 2025 Eves talk contribs created page File:Eves NbTiN GiXRD rawta ft may 2025.png (File uploaded with MsUpload)
- 17:52, 30 July 2025 Eves talk contribs uploaded File:Eves NbTiN GiXRD rawta ft may 2025.png (File uploaded with MsUpload)
- 14:40, 30 July 2025 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of Tantalum/Sputtering of Ta in Sputter-System Metal-Nitride-PC3/Ta PC3 Src3 DC test 2022 (Created page with "<i>This page is written by <b>Evgeniy Shkondin @DTU Nanolab</b> if nothing else is stated. <br> All images and photos on this page belongs to <b>DTU Nanolab</b>.<br> The fabrication and characterization described below were conducted in <b>2022 by Evgeniy Shkondin, DTU Nanolab</b>.<br></i> <b>Important Note!</b> The deposition was carried out in 2022 with a weakened magnetron! This explains the high DC bias voltages. The magnetron was changed to an HSM type in 2024. For...")
- 14:40, 30 July 2025 Eves talk contribs created page File:Eves XRR Ta DC 200C 2022 20250720.png (File uploaded with MsUpload)
- 14:40, 30 July 2025 Eves talk contribs uploaded File:Eves XRR Ta DC 200C 2022 20250720.png (File uploaded with MsUpload)
- 14:40, 30 July 2025 Eves talk contribs created page File:Eves XRR Ta DC RT 2022 20250720.png (File uploaded with MsUpload)
- 14:40, 30 July 2025 Eves talk contribs uploaded File:Eves XRR Ta DC RT 2022 20250720.png (File uploaded with MsUpload)
- 14:40, 30 July 2025 Eves talk contribs created page File:Eves XRR Ta DC 600C 2022 20250720.png (File uploaded with MsUpload)
- 14:40, 30 July 2025 Eves talk contribs uploaded File:Eves XRR Ta DC 600C 2022 20250720.png (File uploaded with MsUpload)
- 14:40, 30 July 2025 Eves talk contribs created page File:Eves XRR Ta DC 500C 2022 20250720.png (File uploaded with MsUpload)
- 14:40, 30 July 2025 Eves talk contribs uploaded File:Eves XRR Ta DC 500C 2022 20250720.png (File uploaded with MsUpload)
