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Combined display of all available logs of LabAdviser. You can narrow down the view by selecting a log type, the username (case-sensitive), or the affected page (also case-sensitive).
- 11:51, 14 May 2025 Mmat talk contribs created page Specific Process Knowledge/Getting Started (Created page with " == Getting Started[edit | edit source] == As a new user to DTU Nanolab (and nano- and microfabrication), it might be difficult for you to find a good starting point on how to access our facility. This page is a guideline on how to start your process in our cleanroom. Not all points listed below might be relevant for you. You are always welcome to contact us at nanolabsupport@nanolab.dtu.dk, if you have any questions. # '''Register''' as user at www.nanolab.dtu.dk #* Re...") Tag: Visual edit
- 14:08, 12 May 2025 User account Majgoft talk contribs was created automatically
- 14:07, 8 May 2025 Mmat talk contribs created page LabAdviser/Safety (Description of how to get access to the different facilities at DTU Nanolab, including how to sign up for safety training, which online courses to take, how to request training.) Tag: Visual edit
- 13:42, 7 May 2025 Mmat talk contribs uploaded a new version of File:YouTube.JPG
- 14:55, 6 May 2025 Bghe talk contribs deleted page Specific Process Knowledge/Lithography/EBeamLithography/RaithElphyManual (content was: "'''Feedback to this page''': '''[mailto:e-beam@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Lithography click here]''' = <span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>200px = Purpose, location and technical specifications = '''OBSOLETE! This to...", and the only contributor was "Tigre" (talk))
- 10:23, 6 May 2025 Bghe talk contribs deleted page Specific Process Knowledge/Lithography/EBeamLithography/JEOL Processes (content before blanking was: "<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>200px =Large area circle arrays= Arrays of circles can naturally be exposed by exposing a pattern that consists of circles. In this scheme each circle will consist of a number of beam shots to fill the shape of each circle. For large areas this can however be very time consuming and pattern files can become very large. Hence, in this work we investigate a di...")
- 14:43, 5 May 2025 Bghe talk contribs deleted page Specific Process Knowledge/Lithography/ARP617 (content before blanking was: "Test of copolymer AR-P 617.05; a positive e-beam resist from AllResist. This copolymer is meant to be used as a sacrificial layer in a bi- or tri-layer e-beam resist stack (i.e. bottom layer). The copolymer adheres well on many substrates and can be dry-etched isotropically (to create under-cut) and anisotropically by reactive ion etch. Furthermore, it is softbaked at temperatures above 200 degrees and thus themally stable to many post-processing steps. This is...")
- 12:07, 5 May 2025 User account Frfed talk contribs was created automatically
- 08:53, 5 May 2025 Bghe talk contribs deleted page Specific Process Knowledge/Etch/Etching of Molybdæn (content was: "=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>200px= <code><nowiki>=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>200px=</nowiki></code> <!-- =<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>200px= --> ==Comp...", and the only contributor was "Mbec" (talk))
- 14:48, 2 May 2025 Bghe talk contribs deleted page Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/HfO2 etch (content was: "'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/IBE⁄IBSD_Ionfab_300/HfO2_etch click here]''' =<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>200px= =jklajakjg= ==jglasdjfg==", and the only contributor was "Shuya" (talk))
- 14:27, 2 May 2025 Bghe talk contribs deleted page Substrates/130 mm by 130 mm by 6.35 mm substrates (not existing)
- 13:55, 2 May 2025 Bghe talk contribs deleted page Specific Process Knowledge/Etch/DRIE-Pegasus/Pegsus-1 (content was: "'''WRONG ADDRESS - MUST BE DELETED!!!!!''' '''The user manual(s), quality control procedure(s) and results, user APV(s), technical information and contact information can be found in LabManager:''' Equipment info in [http://labmanager.nanolab.dtu.dk/function.php?module=Machine&view=view&mach=265| LabManager] == Process information == '''SPTS process notation''' Describing a proces...", and the only contributor was "Jmli" (talk))
- 13:51, 2 May 2025 Bghe talk contribs deleted page Specific Process Knowledge/Etch/DRIE-Pegasus 3/DREM0.5kWv2.3 (content was: "<!--Checked for updates on 4/4-2025 - ok/jmli -->", and the only contributor was "Jmli" (talk))
- 13:51, 2 May 2025 Bghe talk contribs deleted page LabAdviser/314/Microscopy 314-307/TEM/T20/Schematic (content before blanking was: "800px")
- 13:50, 2 May 2025 Bghe talk contribs deleted page LabAdviser/314/Microscopy 314-307/TEM/T20/Booking rules (content before blanking was: "'''Tecnai TEM Booking rules:''' '''1) Booking''' Each Tecnai user can book up to 2 SESSIONS in advance. This means that users can have only 2 SESSIONS booked for the future. It does not matter how far in the future the two sessions are booked. e.g. sessions can be booked for today & tomorrow, or today and Monday next week. Once you have 2 sessions booked, you can't book any more. As soon as you have finished one session, you can then book another. But you ca...")
- 13:50, 2 May 2025 Bghe talk contribs deleted page LabAdviser/CEN (content before blanking was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/LabAdviser/CEN click here]''' =This page gives an overview of the electron microscope equipment and other related resources connected to DTU Nanolab - building 307/314= ==SEM== *SEM Comparison page - all of DTU Nanolabs SEMs */Nova Nan...")
- 13:49, 2 May 2025 Bghe talk contribs deleted page LabAdviser/CEN/AFEG 250 Analytical ESEM (content before blanking was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=LabAdviser/CEN/Quanta_FEG_200_ESEM click here]''' <!-- Replace "http://labadviser.danchip.dtu.dk/..." wih the link to the Labadviser page--> The FEI AFEG 250 FEG is a field emission scanning electron microscope with a spatial resolution of 2 nm for the ETD detector in high vacuum at 30 keV. The microscope can o...")
- 09:52, 2 May 2025 Jehem talk contribs created page File:Aligner MLA 3.jpg
- 09:52, 2 May 2025 Jehem talk contribs uploaded File:Aligner MLA 3.jpg
- 09:52, 2 May 2025 Jehem talk contribs created page File:Aligner MLA 2.jpg
- 09:52, 2 May 2025 Jehem talk contribs uploaded File:Aligner MLA 2.jpg
- 12:54, 1 May 2025 User account S247196 talk contribs was created automatically
- 11:18, 1 May 2025 Bghe talk contribs created page Specific Process Knowledge/Preparation (Created page with "'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Preparation click here]''' =<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>200px=")
- 17:27, 28 April 2025 User account Laurih talk contribs was created automatically
- 17:11, 28 April 2025 Mmat talk contribs uploaded a new version of File:LabAdviser structure.jpg
- 15:48, 28 April 2025 Mmat talk contribs reverted File:FumehoodsOverview1.jpg to an old version (Reverted to version as of 15:42, 28 April 2025 (CEST))
- 15:47, 28 April 2025 Mmat talk contribs reverted File:FumehoodsOverview1.jpg to an old version (Reverted to version as of 10:28, 11 September 2024 (CEST))
- 15:42, 28 April 2025 Mmat talk contribs uploaded a new version of File:FumehoodsOverview1.jpg
- 13:15, 15 April 2025 User account Massza talk contribs was created automatically
- 12:07, 15 April 2025 User account Luiba talk contribs was created automatically
- 11:19, 15 April 2025 User account Parch talk contribs was created automatically
- 11:18, 10 April 2025 User account Bilsa talk contribs was created automatically
- 10:03, 9 April 2025 Taran talk contribs created page File:NLOF solventdev 2024.pdf
- 10:03, 9 April 2025 Taran talk contribs uploaded File:NLOF solventdev 2024.pdf
- 09:20, 4 April 2025 User account Jnovaa talk contribs was created automatically
- 12:11, 3 April 2025 User account Tosim talk contribs was created automatically
- 17:06, 2 April 2025 Jehem talk contribs created page Specific Process Knowledge/Lithography/UVlithographyProcessPages (Created page with "{| style="border-collapse: separate; border-spacing: 1; border:none;padding:0"; cellpadding="10"; cellspacing="5"; width="100%"; |- | style="border-radius: 10px; background: #f9f9f9; border: 1px #aaa solid; width: 20%"; valign="top" | '''<big><div class="center">Pre-lithography</div></big>''' <div class="center"><hr width="75%"></div> <br> '''Resist''' *Specific_Process_Knowledge/Lithography/Resist#User_resist_bottles_i...")
- 14:28, 2 April 2025 Thope talk contribs created page Specific Process Knowledge/Wafer cleaning/Bring samples into cleanroom (Created page with "'''Feedback to this page''': '''[mailto:wetchemistry@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Wafer_cleaning/Cleaning_with_Soap_Sonic click here]''' '''Unless anything else is stated, everything on this page, text and pictures are made by DTU Nanolab.''' '''All links to Labmanager requires login.''' =Bringing samples into the DTU Nanolab cleanroom= To avoid cross contamination of fabricat...") Tag: Visual edit: Switched
- 14:16, 2 April 2025 User account Jbram talk contribs was created automatically
- 11:46, 2 April 2025 User account Damonc talk contribs was created automatically
- 09:07, 1 April 2025 Thope talk contribs created page File:Request to bring Samples into CR v1.51.docx (File uploaded with MsUpload)
- 09:07, 1 April 2025 Thope talk contribs uploaded File:Request to bring Samples into CR v1.51.docx (File uploaded with MsUpload)
- 21:15, 31 March 2025 User account Laswebr talk contribs was created automatically
- 17:33, 31 March 2025 User account Krjens talk contribs was created automatically
- 15:27, 31 March 2025 User account Aliar talk contribs was created automatically
- 14:07, 31 March 2025 Bghe talk contribs deleted page LabAdviser/Courses/TPT Lithography (content was: "<span style="color:red">This page can be deleted</span> <!--- '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/Courses/TPT_Lithography click here]''' DTU Nanolab offers a Tool Package Training in Lithography; the course includes theory on lithographic processes and equipment. After the TPT has been successfully completed, you can begin training on the lithography equipm...")
- 13:42, 31 March 2025 Bghe talk contribs deleted page Specific Process Knowledge/Etch/Etching of Polymer/Etch of Photo Resist using RIE (content was: "'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/Etching_of_Polymer/Etch_of_Photo_Resist_using_RIE click here]''' =<span style="color:#FF0000"> Both RIE's (RIE1 and RIE2) for silicon based etching has been decommissioned </span> = * <span style="color:#FF0000"> This information is save because it might be valuable as inspiration for other dry etch s...")
- 13:03, 31 March 2025 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Sputtering of ITO in Sputter-System Metal-Oxide (PC1) (content was: "PLEASE DELETE THIS PAGE!", and the only contributor was "Eves" (talk))
- 13:03, 31 March 2025 Bghe talk contribs deleted page Specific Process Knowledge/Characterization/XRD/XRD SmartLab/ALD deposited alumina and titania XRR and SE comparison (content was: "Empty page need to be deleted!", and the only contributor was "Eves" (talk))
- 16:00, 28 March 2025 Mbec talk contribs created page File:DENS21029W7and8SMoWetEtchTets-CrEtch18-1min 04 (002).tif
