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- 17:36, 9 January 2023 User account Sobrs talk contribs was created automatically
- 08:33, 8 January 2023 User account Serle talk contribs was created automatically
- 11:48, 6 January 2023 User account Shani talk contribs was created automatically
- 14:11, 5 January 2023 User account S184439 talk contribs was created automatically
- 20:08, 4 January 2023 User account Hekris talk contribs was created automatically
- 20:06, 4 January 2023 User account S203939 talk contribs was created automatically
- 19:48, 4 January 2023 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of Chromium/Sputtering of Cr in Cluster Lesker PC1 (Created page with "This page presents the results of Cr deposition using DC sputtering in Sputter-System Metal-Oxide(PC1), now commonly known as "Cluster Lesker". The deposition target is Cr 3-inch. Source #3 (DC - HSM) was used. Cr is of particular interest in the dry etch as it serves as a durable hard mask in the quest to go beyond an aspect ratio of 100 in Si etching. Many users combines deposition of Cr with RF sputtering of Si to build the CrSi bilayer structure that acts as a hard...")
- 19:48, 4 January 2023 Eves talk contribs created page File:Eves XPs Cr PC1 Src3 O1s 20230104.png (File uploaded with MsUpload)
- 19:48, 4 January 2023 Eves talk contribs uploaded File:Eves XPs Cr PC1 Src3 O1s 20230104.png (File uploaded with MsUpload)
- 19:48, 4 January 2023 Eves talk contribs created page File:Eves XPS Cr PC1 Src3 DC Survey surf 20230104.png (File uploaded with MsUpload)
- 19:48, 4 January 2023 Eves talk contribs uploaded File:Eves XPS Cr PC1 Src3 DC Survey surf 20230104.png (File uploaded with MsUpload)
- 19:48, 4 January 2023 Eves talk contribs created page File:Eves XPS Cr PC1 Src3 DC Survey bulk 20230104.png (File uploaded with MsUpload)
- 19:48, 4 January 2023 Eves talk contribs uploaded File:Eves XPS Cr PC1 Src3 DC Survey bulk 20230104.png (File uploaded with MsUpload)
- 19:48, 4 January 2023 Eves talk contribs created page File:Eves XPS Cr PC1 Src3 DC atm conc 20230104.png (File uploaded with MsUpload)
- 19:48, 4 January 2023 Eves talk contribs uploaded File:Eves XPS Cr PC1 Src3 DC atm conc 20230104.png (File uploaded with MsUpload)
- 19:48, 4 January 2023 Eves talk contribs created page File:Eves XPS Cr PC1 Src3 DC 2D 20230104.png (File uploaded with MsUpload)
- 19:48, 4 January 2023 Eves talk contribs uploaded File:Eves XPS Cr PC1 Src3 DC 2D 20230104.png (File uploaded with MsUpload)
- 19:48, 4 January 2023 Eves talk contribs created page File:Eves XPs Cr PC1 Src3 Cr2p 20230104.png (File uploaded with MsUpload)
- 19:48, 4 January 2023 Eves talk contribs uploaded File:Eves XPs Cr PC1 Src3 Cr2p 20230104.png (File uploaded with MsUpload)
- 19:48, 4 January 2023 Eves talk contribs created page File:Eves deprec Cr PC1 Src3 DC voltage 20230104.png (File uploaded with MsUpload)
- 19:48, 4 January 2023 Eves talk contribs uploaded File:Eves deprec Cr PC1 Src3 DC voltage 20230104.png (File uploaded with MsUpload)
- 19:48, 4 January 2023 Eves talk contribs created page File:Eves deprec Cr PC1 Src3 DC subs shutter 20230104.png (File uploaded with MsUpload)
- 19:48, 4 January 2023 Eves talk contribs uploaded File:Eves deprec Cr PC1 Src3 DC subs shutter 20230104.png (File uploaded with MsUpload)
- 19:48, 4 January 2023 Eves talk contribs created page File:Eves deprec Cr PC1 Src3 DC src shutter 20230104.png (File uploaded with MsUpload)
- 19:48, 4 January 2023 Eves talk contribs uploaded File:Eves deprec Cr PC1 Src3 DC src shutter 20230104.png (File uploaded with MsUpload)
- 19:48, 4 January 2023 Eves talk contribs created page File:Eves deprec Cr PC1 Src3 DC pressure 20230104.png (File uploaded with MsUpload)
- 19:48, 4 January 2023 Eves talk contribs uploaded File:Eves deprec Cr PC1 Src3 DC pressure 20230104.png (File uploaded with MsUpload)
- 19:48, 4 January 2023 Eves talk contribs created page File:Eves deprec Cr PC1 Src3 DC power 20230104.png (File uploaded with MsUpload)
- 19:48, 4 January 2023 Eves talk contribs uploaded File:Eves deprec Cr PC1 Src3 DC power 20230104.png (File uploaded with MsUpload)
- 19:48, 4 January 2023 Eves talk contribs created page File:Eves Cr PC1 Src3 XRR 20230104.png (File uploaded with MsUpload)
- 19:48, 4 January 2023 Eves talk contribs uploaded File:Eves Cr PC1 Src3 XRR 20230104.png (File uploaded with MsUpload)
- 19:48, 4 January 2023 Eves talk contribs created page File:Eves Cr PC1 Src3 particle scan g4 20230104 2.png (File uploaded with MsUpload)
- 19:48, 4 January 2023 Eves talk contribs uploaded File:Eves Cr PC1 Src3 particle scan g4 20230104 2.png (File uploaded with MsUpload)
- 19:48, 4 January 2023 Eves talk contribs created page File:Eves Cr PC1 Src3 particle scan g3 20230104 2.png (File uploaded with MsUpload)
- 19:48, 4 January 2023 Eves talk contribs uploaded File:Eves Cr PC1 Src3 particle scan g3 20230104 2.png (File uploaded with MsUpload)
- 19:48, 4 January 2023 Eves talk contribs created page File:Eves XPs Cr PC1 Src3 Si2p 20230104.png (File uploaded with MsUpload)
- 19:48, 4 January 2023 Eves talk contribs uploaded File:Eves XPs Cr PC1 Src3 Si2p 20230104.png (File uploaded with MsUpload)
- 14:51, 4 January 2023 User account Pritban talk contribs was created automatically
- 16:41, 3 January 2023 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of Chromium/Sputtering of Cr in Cluster Lesker PC3 (Created page with "This page presents the results of Cr deposition using DC sputtering in Sputter-system Metal-Nitride (PC3), now commonly known as "Cluster Lesker". The deposition target is Cr 3-inch. Source #2 (DC/p-DC) was used. The fabrication and characterization described below were conducted in <i>2022 by Evgeniy Shkondin, DTU Nanolab</i>. The focus of the study was the deposition conditions and uniformity check across 150mm wafer. The prepared film was investigated by the X-ray...")
- 16:41, 3 January 2023 Eves talk contribs created page File:Eves XRR Cr center PC3 Src2 DC 20230103.png (File uploaded with MsUpload)
- 16:41, 3 January 2023 Eves talk contribs uploaded File:Eves XRR Cr center PC3 Src2 DC 20230103.png (File uploaded with MsUpload)
- 16:41, 3 January 2023 Eves talk contribs created page File:Eves XRR Cr edge PC3 Src2 DC 20230103.png (File uploaded with MsUpload)
- 16:41, 3 January 2023 Eves talk contribs uploaded File:Eves XRR Cr edge PC3 Src2 DC 20230103.png (File uploaded with MsUpload)
- 09:27, 3 January 2023 User account S184074 talk contribs was created automatically
- 09:27, 3 January 2023 User account S194016 talk contribs was created automatically
- 09:26, 3 January 2023 User account S213045 talk contribs was created automatically
- 09:25, 3 January 2023 User account S213552 talk contribs was created automatically
- 09:25, 3 January 2023 User account S222531 talk contribs was created automatically
- 09:22, 3 January 2023 User account S212984 talk contribs was created automatically
- 19:17, 2 January 2023 User account Softi talk contribs was created automatically