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- 15:31, 6 April 2011 Jml talk contribs uploaded File:WF 2E04 mar23 2011-150a.jpg (Etching of nanostructures in Si using the ICP metal etcher: Sinano3.31 recipe, Run ID 461, 462 and 463, time 60, 120 and 180 secs, BCl3 5, HBr 15, 2mtorr, 900/75 coil/platen, 50 degs. 30 mm spacers)
- 15:31, 6 April 2011 Jml talk contribs uploaded File:WF 2E04 mar23 2011-120c.jpg (Etching of nanostructures in Si using the ICP metal etcher: Sinano3.31 recipe, Run ID 461, 462 and 463, time 60, 120 and 180 secs, BCl3 5, HBr 15, 2mtorr, 900/75 coil/platen, 50 degs. 30 mm spacers)
- 15:31, 6 April 2011 Jml talk contribs uploaded File:WF 2E04 mar23 2011-120b.jpg (Etching of nanostructures in Si using the ICP metal etcher: Sinano3.31 recipe, Run ID 461, 462 and 463, time 60, 120 and 180 secs, BCl3 5, HBr 15, 2mtorr, 900/75 coil/platen, 50 degs. 30 mm spacers)
- 15:31, 6 April 2011 Jml talk contribs uploaded File:WF 2E04 mar23 2011-120a.jpg (Etching of nanostructures in Si using the ICP metal etcher: Sinano3.31 recipe, Run ID 461, 462 and 463, time 60, 120 and 180 secs, BCl3 5, HBr 15, 2mtorr, 900/75 coil/platen, 50 degs. 30 mm spacers)
- 15:31, 6 April 2011 Jml talk contribs uploaded File:WF 2E04 mar23 2011-090c.jpg (Etching of nanostructures in Si using the ICP metal etcher: Sinano3.31 recipe, Run ID 461, 462 and 463, time 60, 120 and 180 secs, BCl3 5, HBr 15, 2mtorr, 900/75 coil/platen, 50 degs. 30 mm spacers)
- 15:30, 6 April 2011 Jml talk contribs uploaded File:WF 2E04 mar23 2011-090b.jpg (Etching of nanostructures in Si using the ICP metal etcher: Sinano3.31 recipe, Run ID 461, 462 and 463, time 60, 120 and 180 secs, BCl3 5, HBr 15, 2mtorr, 900/75 coil/platen, 50 degs. 30 mm spacers)
- 15:30, 6 April 2011 Jml talk contribs uploaded File:WF 2E04 mar23 2011-090a.jpg (Etching of nanostructures in Si using the ICP metal etcher: Sinano3.31 recipe, Run ID 461, 462 and 463, time 60, 120 and 180 secs, BCl3 5, HBr 15, 2mtorr, 900/75 coil/platen, 50 degs. 30 mm spacers)
- 15:30, 6 April 2011 Jml talk contribs uploaded File:WF 2E04 mar23 2011-060c.jpg (Etching of nanostructures in Si using the ICP metal etcher: Sinano3.31 recipe, Run ID 461, 462 and 463, time 60, 120 and 180 secs, BCl3 5, HBr 15, 2mtorr, 900/75 coil/platen, 50 degs. 30 mm spacers)
- 15:30, 6 April 2011 Jml talk contribs uploaded File:WF 2E04 mar23 2011-060b.jpg (Etching of nanostructures in Si using the ICP metal etcher: Sinano3.31 recipe, Run ID 461, 462 and 463, time 60, 120 and 180 secs, BCl3 5, HBr 15, 2mtorr, 900/75 coil/platen, 50 degs. 30 mm spacers)
- 15:29, 6 April 2011 Jml talk contribs uploaded File:WF 2E04 mar23 2011-060a.jpg (Etching of nanostructures in Si using the ICP metal etcher: Sinano3.31 recipe, Run ID 461, 462 and 463, time 60, 120 and 180 secs, BCl3 5, HBr 15, 2mtorr, 900/75 coil/platen, 50 degs. 30 mm spacers)
- 15:29, 6 April 2011 Jml talk contribs uploaded File:WF 2E04 mar23 2011-030c.jpg (Etching of nanostructures in Si using the ICP metal etcher: Sinano3.31 recipe, Run ID 461, 462 and 463, time 60, 120 and 180 secs, BCl3 5, HBr 15, 2mtorr, 900/75 coil/platen, 50 degs. 30 mm spacers)
- 15:29, 6 April 2011 Jml talk contribs uploaded File:WF 2E04 mar23 2011-030b.jpg (Etching of nanostructures in Si using the ICP metal etcher: Sinano3.31 recipe, Run ID 461, 462 and 463, time 60, 120 and 180 secs, BCl3 5, HBr 15, 2mtorr, 900/75 coil/platen, 50 degs. 30 mm spacers)
- 15:29, 6 April 2011 Jml talk contribs uploaded File:WF 2E04 mar23 2011-030a.jpg (Etching of nanostructures in Si using the ICP metal etcher: Sinano3.31 recipe, Run ID 461, 462 and 463, time 60, 120 and 180 secs, BCl3 5, HBr 15, 2mtorr, 900/75 coil/platen, 50 degs. 30 mm spacers)
- 10:17, 5 April 2011 Ast talk contribs changed group membership for Vbab from (none) to fotonik
- 13:42, 4 April 2011 Jml talk contribs uploaded File:WF 2E03 mar23 2011-150c.jpg (Etching of nanostructures in Si using the ICP metal etcher: Sinano3.31 recipe, Run ID 452(abc), 453(bc) and 454 (c), time 60, 120 and 180 secs, BCl3 5, HBr 15, 2mtorr, 900/75 coil/platen, 50 degs.)
- 13:42, 4 April 2011 Jml talk contribs uploaded File:WF 2E03 mar23 2011-150b.jpg (Etching of nanostructures in Si using the ICP metal etcher: Sinano3.31 recipe, Run ID 452(abc), 453(bc) and 454 (c), time 60, 120 and 180 secs, BCl3 5, HBr 15, 2mtorr, 900/75 coil/platen, 50 degs.)
- 13:42, 4 April 2011 Jml talk contribs uploaded File:WF 2E03 mar23 2011-150a.jpg (Etching of nanostructures in Si using the ICP metal etcher: Sinano3.31 recipe, Run ID 452(abc), 453(bc) and 454 (c), time 60, 120 and 180 secs, BCl3 5, HBr 15, 2mtorr, 900/75 coil/platen, 50 degs.)
- 13:42, 4 April 2011 Jml talk contribs uploaded File:WF 2E03 mar23 2011-120c.jpg (Etching of nanostructures in Si using the ICP metal etcher: Sinano3.31 recipe, Run ID 452(abc), 453(bc) and 454 (c), time 60, 120 and 180 secs, BCl3 5, HBr 15, 2mtorr, 900/75 coil/platen, 50 degs.)
- 13:41, 4 April 2011 Jml talk contribs uploaded File:WF 2E03 mar23 2011-120b.jpg (Etching of nanostructures in Si using the ICP metal etcher: Sinano3.31 recipe, Run ID 452(abc), 453(bc) and 454 (c), time 60, 120 and 180 secs, BCl3 5, HBr 15, 2mtorr, 900/75 coil/platen, 50 degs.)
- 13:41, 4 April 2011 Jml talk contribs uploaded File:WF 2E03 mar23 2011-120a.jpg (Etching of nanostructures in Si using the ICP metal etcher: Sinano3.31 recipe, Run ID 452(abc), 453(bc) and 454 (c), time 60, 120 and 180 secs, BCl3 5, HBr 15, 2mtorr, 900/75 coil/platen, 50 degs.)
- 13:41, 4 April 2011 Jml talk contribs uploaded File:WF 2E03 mar23 2011-090c.jpg (Etching of nanostructures in Si using the ICP metal etcher: Sinano3.31 recipe, Run ID 452(abc), 453(bc) and 454 (c), time 60, 120 and 180 secs, BCl3 5, HBr 15, 2mtorr, 900/75 coil/platen, 50 degs.)
- 13:41, 4 April 2011 Jml talk contribs uploaded File:WF 2E03 mar23 2011-090b.jpg (Etching of nanostructures in Si using the ICP metal etcher: Sinano3.31 recipe, Run ID 452(abc), 453(bc) and 454 (c), time 60, 120 and 180 secs, BCl3 5, HBr 15, 2mtorr, 900/75 coil/platen, 50 degs.)
- 13:41, 4 April 2011 Jml talk contribs uploaded File:WF 2E03 mar23 2011-090a.jpg (Etching of nanostructures in Si using the ICP metal etcher: Sinano3.31 recipe, Run ID 452(abc), 453(bc) and 454 (c), time 60, 120 and 180 secs, BCl3 5, HBr 15, 2mtorr, 900/75 coil/platen, 50 degs.)
- 13:41, 4 April 2011 Jml talk contribs uploaded File:WF 2E03 mar23 2011-060c.jpg (Etching of nanostructures in Si using the ICP metal etcher: Sinano3.31 recipe, Run ID 452(abc), 453(bc) and 454 (c), time 60, 120 and 180 secs, BCl3 5, HBr 15, 2mtorr, 900/75 coil/platen, 50 degs.)
- 13:41, 4 April 2011 Jml talk contribs uploaded File:WF 2E03 mar23 2011-060b.jpg (Etching of nanostructures in Si using the ICP metal etcher: Sinano3.31 recipe, Run ID 452(abc), 453(bc) and 454 (c), time 60, 120 and 180 secs, BCl3 5, HBr 15, 2mtorr, 900/75 coil/platen, 50 degs.)
- 13:40, 4 April 2011 Jml talk contribs uploaded File:WF 2E03 mar23 2011-060a.jpg (Etching of nanostructures in Si using the ICP metal etcher: Sinano3.31 recipe, Run ID 452(abc), 453(bc) and 454 (c), time 60, 120 and 180 secs, BCl3 5, HBr 15, 2mtorr, 900/75 coil/platen, 50 degs.)
- 13:40, 4 April 2011 Jml talk contribs uploaded File:WF 2E03 mar23 2011-030c.jpg (Etching of nanostructures in Si using the ICP metal etcher: Sinano3.31 recipe, Run ID 452(abc), 453(bc) and 454 (c), time 60, 120 and 180 secs, BCl3 5, HBr 15, 2mtorr, 900/75 coil/platen, 50 degs.)
- 13:40, 4 April 2011 Jml talk contribs uploaded File:WF 2E03 mar23 2011-030b.jpg (Etching of nanostructures in Si using the ICP metal etcher: Sinano3.31 recipe, Run ID 452(abc), 453(bc) and 454 (c), time 60, 120 and 180 secs, BCl3 5, HBr 15, 2mtorr, 900/75 coil/platen, 50 degs.)
- 13:40, 4 April 2011 Jml talk contribs uploaded File:WF 2E03 mar23 2011-030a.jpg (Etching of nanostructures in Si using the ICP metal etcher: Sinano3.31 recipe, Run ID 452(abc), 453(bc) and 454 (c), time 60, 120 and 180 secs, BCl3 5, HBr 15, 2mtorr, 900/75 coil/platen, 50 degs.)
- 11:08, 4 April 2011 Ast talk contribs changed group membership for Giori from (none) to nanotech
- 09:59, 31 March 2011 Ast talk contribs changed group membership for Oiw from (none) to nanotech
- 15:02, 30 March 2011 Jml talk contribs uploaded File:WF 2E01 mar23 2011 150b.jpg (Etching of nanostructures in Si using DRIE-Pegasus: nano1.3 recipe, Run ID 1856 (a) and 1857 (a+b), time 60 secs (a) and 120 secs (b), SF6 38, C4F8 52, 4mtorr, 600/40 coil/platen, -10 degs.)
- 15:02, 30 March 2011 Jml talk contribs uploaded File:WF 2E01 mar23 2011 150a.jpg (Etching of nanostructures in Si using DRIE-Pegasus: nano1.3 recipe, Run ID 1856 (a) and 1857 (a+b), time 60 secs (a) and 120 secs (b), SF6 38, C4F8 52, 4mtorr, 600/40 coil/platen, -10 degs.)
- 15:02, 30 March 2011 Jml talk contribs uploaded File:WF 2E01 mar23 2011 120b.jpg (Etching of nanostructures in Si using DRIE-Pegasus: nano1.3 recipe, Run ID 1856 (a) and 1857 (a+b), time 60 secs (a) and 120 secs (b), SF6 38, C4F8 52, 4mtorr, 600/40 coil/platen, -10 degs.)
- 15:01, 30 March 2011 Jml talk contribs uploaded File:WF 2E01 mar23 2011 120a.jpg (Etching of nanostructures in Si using DRIE-Pegasus: nano1.3 recipe, Run ID 1856 (a) and 1857 (a+b), time 60 secs (a) and 120 secs (b), SF6 38, C4F8 52, 4mtorr, 600/40 coil/platen, -10 degs.)
- 15:01, 30 March 2011 Jml talk contribs uploaded File:WF 2E01 mar23 2011 090b.jpg (Etching of nanostructures in Si using DRIE-Pegasus: nano1.3 recipe, Run ID 1856 (a) and 1857 (a+b), time 60 secs (a) and 120 secs (b), SF6 38, C4F8 52, 4mtorr, 600/40 coil/platen, -10 degs.)
- 15:01, 30 March 2011 Jml talk contribs uploaded File:WF 2E01 mar23 2011 090a.jpg (Etching of nanostructures in Si using DRIE-Pegasus: nano1.3 recipe, Run ID 1856 (a) and 1857 (a+b), time 60 secs (a) and 120 secs (b), SF6 38, C4F8 52, 4mtorr, 600/40 coil/platen, -10 degs.)
- 15:01, 30 March 2011 Jml talk contribs uploaded File:WF 2E01 mar23 2011 060b.jpg (Etching of nanostructures in Si using DRIE-Pegasus: nano1.3 recipe, Run ID 1856 (a) and 1857 (a+b), time 60 secs (a) and 120 secs (b), SF6 38, C4F8 52, 4mtorr, 600/40 coil/platen, -10 degs.)
- 15:01, 30 March 2011 Jml talk contribs uploaded File:WF 2E01 mar23 2011 060a.jpg (Etching of nanostructures in Si using DRIE-Pegasus: nano1.3 recipe, Run ID 1856 (a) and 1857 (a+b), time 60 secs (a) and 120 secs (b), SF6 38, C4F8 52, 4mtorr, 600/40 coil/platen, -10 degs.)
- 15:01, 30 March 2011 Jml talk contribs uploaded File:WF 2E01 mar23 2011 030b.jpg (Etching of nanostructures in Si using DRIE-Pegasus: nano1.3 recipe, Run ID 1856 (a) and 1857 (a+b), time 60 secs (a) and 120 secs (b), SF6 38, C4F8 52, 4mtorr, 600/40 coil/platen, -10 degs.)
- 15:01, 30 March 2011 Jml talk contribs uploaded File:WF 2E01 mar23 2011 030a.jpg (Etching of nanostructures in Si using DRIE-Pegasus: nano1.3 recipe, Run ID 1856 (a) and 1857 (a+b), time 60 secs (a) and 120 secs (b), SF6 38, C4F8 52, 4mtorr, 600/40 coil/platen, -10 degs.)
- 09:19, 28 March 2011 Ast talk contribs changed group membership for Dgar from (none) to fotonik
- 16:18, 24 March 2011 Jml talk contribs uploaded File:WF 2C5 feb2011 150.jpg (Etching of nanostructures in Si using DRIE-Pegasus: nano1.0 recipe, Run ID 1817, time 120 secs, SF6 38, C4F8 52, 4mtorr, 800/50 coil/platen, -10 degs.)
- 16:18, 24 March 2011 Jml talk contribs uploaded File:WF 2C5 feb2011 120.jpg (Etching of nanostructures in Si using DRIE-Pegasus: nano1.0 recipe, Run ID 1817, time 120 secs, SF6 38, C4F8 52, 4mtorr, 800/50 coil/platen, -10 degs.)
- 16:18, 24 March 2011 Jml talk contribs uploaded File:WF 2C5 feb2011 090.jpg (Etching of nanostructures in Si using DRIE-Pegasus: nano1.0 recipe, Run ID 1817, time 120 secs, SF6 38, C4F8 52, 4mtorr, 800/50 coil/platen, -10 degs.)
- 16:18, 24 March 2011 Jml talk contribs uploaded File:WF 2C5 feb2011 060.jpg (Etching of nanostructures in Si using DRIE-Pegasus: nano1.0 recipe, Run ID 1817, time 120 secs, SF6 38, C4F8 52, 4mtorr, 800/50 coil/platen, -10 degs.)
- 16:18, 24 March 2011 Jml talk contribs uploaded File:WF 2C5 feb2011 030.jpg (Etching of nanostructures in Si using DRIE-Pegasus: nano1.0 recipe, Run ID 1817, time 120 secs, SF6 38, C4F8 52, 4mtorr, 800/50 coil/platen, -10 degs.)
- 16:17, 24 March 2011 Jml talk contribs uploaded File:WF 2C4 feb2011 150.jpg (Etching of nanostructures in Si using DRIE-Pegasus: nano1.1 recipe, Run ID 1815, time 120 secs, SF6 38, C4F8 52, 4mtorr, 600/50 coil/platen, 10 degs.)
- 16:17, 24 March 2011 Jml talk contribs uploaded File:WF 2C4 feb2011 120.jpg (Etching of nanostructures in Si using DRIE-Pegasus: nano1.1 recipe, Run ID 1815, time 120 secs, SF6 38, C4F8 52, 4mtorr, 600/50 coil/platen, 10 degs.)
- 16:17, 24 March 2011 Jml talk contribs uploaded File:WF 2C4 feb2011 090.jpg (Etching of nanostructures in Si using DRIE-Pegasus: nano1.1 recipe, Run ID 1815, time 120 secs, SF6 38, C4F8 52, 4mtorr, 600/50 coil/platen, 10 degs.)