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• 08:53, 11 February 2016 Bghe talk contribs deleted page Substrates/200 mm round, 8" (content was: "Equipment capable of processing 200 mm round and thin wafers are:<BR> <UL> <LI> Plasma enhanced chemical vapur deposition chambers: PECVD 1, PECVD 2, PECVD3 <LI> Advanc..." (and the only contributor was "Ajoe"))