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• 10:59, 1 June 2015 Bghe talk contribs deleted page Specific Process Knowledge/E-beam lithography/JEOL E-beam Writer (content was: "300x300px|thumb|JEOL E-beam writer: positioned in cleanroom 4 - the E-beam writer room The E-beam Writer is a lithography tool. The very short wavelength of 100 kV electrons makes it possible to focus an...")