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• 10:57, 1 June 2015 Bghe talk contribs deleted page Specific Process Knowledge/E-beam lithography/Spinning e-beam resist (content was: "Spinning e-beam resists demands some special precondition. First of all spinning and post backing must be done with the equipments placed in fume hood, which gives good exhaust. The cleanness of surroundings and the right behavior during...")