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• 10:55, 1 June 2015 Bghe talk contribs deleted page Specific Process Knowledge/E-beam lithography/ZEP520A (content was: "ZEP520A belongs to ZEP520 series of e-beam resists. 520 series are high performance positive e-beam resist which show high resolution, high sensitivity and high dry etch resistance. Resists of this series are suitable for various e-beam ...")