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• 10:54, 1 June 2015 Bghe talk contribs deleted page Specific Process Knowledge/E-beam lithography/E-beam exposure (content was: "Due to the high maintenance cost, Only the Danchip operators are allowed to loading the cassette to the e beam writer. The starting point is a L-Edit file (*.tba). *The first step is to convert this L-Edit file to *.gds. *Then you ex...")