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• 10:53, 1 June 2015 Bghe talk contribs deleted page Specific Process Knowledge/E-beam lithography/PMMA (content was: "PMMA950K is a positive tone e beam resist. it has good resolution (better than 20nm), low sensitivity (around 500uc/cm2 at 100kv). peer dry etch resistance (around 3t..." (and the only contributor was "Pxshi"))