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• 10:14, 28 May 2015 Bghe talk contribs deleted page Specific Process Knowledge/Etch/IBE/IBSD Ionfab 300 (content before blanking was: "='''THIS PAGE IS UNDER CONSTRUCTION'''= ==IBE/IBSD Ionfab 300: milling, dry etching and deposition in the same tool== IBE: Ion Beam Etch IBSD: Ion Beam Sputter Deposition This Ionfab300 from Oxford Instruments is cab...")