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• 12:14, 23 September 2014 Bghe talk contribs deleted page Specific Process Knowledge/Etch/DRIE-Pegasus/Waferloading (content before blanking was: "== Rules as of August 2011 for loading wafers on the Pegasus == Until August 2011 processing at the Pegasus was complicated by frequent losses of wafers during transfer operations. It is evident that the instrument is mu...")