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15:34, 22 April 2014 Bghe talk contribs deleted page Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano34 (content was: "== The Sinano3.4 recipe == {| border="2" cellpadding="2" cellspacing="1" |+ '''Recipe Sinano3.4''' |- ! rowspan="6" align="center"| Recipe | Gas | BCl<sub>3</sub> 5 scc..." (and the only contributor was "Jml"))