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• 08:29, 9 May 2011 Jml talk contribs uploaded File:WF 2E08b 23mar2011-060.jpg (Etching of nanostructures in Si using DRIE-Pegasus: nano1.43 recipe, Run ID 2018, time 120 secs, SF6 38, C4F8 75, 4mtorr, 800/30 coil/platen, -20 degs.)