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• 10:24, 13 April 2011 Jml talk contribs uploaded File:WF 2E06 mar23B-060.jpg (Etching of nanostructures in Si using DRIE-Pegasus: nano1.21 recipe, Run ID 1925, time 120 secs, SF6 38, C4F8 75, 4mtorr, 800/50 coil/platen, -10 degs.)