Main public logs

Combined display of all available logs of LabAdviser. You can narrow down the view by selecting a log type, the username (case-sensitive), or the affected page (also case-sensitive).

• 18:06, 30 July 2025 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of Tantalum Nitride/TaN Reactive Sputtering in Cluster Lesker PC3 (Created page with "<i>This page is written by <b>Evgeniy Shkondin @DTU Nanolab</b> if nothing else is stated. <br> All images and photos on this page belongs to <b>DTU Nanolab</b>.<br> The fabrication and characterization described below were conducted in <b>2025 by Rawa Tanta</b> and <b>Evgeniy Shkondin, DTU Nanolab</b>.<br></i> This page presents the results of TaN deposition using Reactive p-DC sputtering in Sputter-System Metal-Nitride(PC3), now commonly known as "Cluster Lesker". Th...")