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• 19:13, 25 July 2025 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of Niobium Nitride (Created page with "{{cc-nanolab}} '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_Niobium_Nitride=submit click here]''' == Deposition of Niobium Nitride == Deposition of ScN can only be done by reactive sputtering using Sc target. The only tool for this application is the Cluster-based multi-chamber high vacuum sputtering...")