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• 22:41, 16 July 2025 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of MoSi (Created page with "Molybdenum silicide is particularly attractive for optical coatings because co-sputtering Mo with Si allows precise control of MoSi stoichiometry—and, in turn, the film’s refractive index at the design wavelength. MoSi alloy can be deposited by DC co-sputtering in either Sputter-System Metal-Oxide (PC1) or Sputter-System Metal-Nitride (PC3)—collectively referred to as the Cluster Lesker. The process uses two 3-inch targets: *Mo (unbonded) *Si (indium-bonded) A...")