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• 10:23, 6 May 2025 Bghe talk contribs deleted page Specific Process Knowledge/Lithography/EBeamLithography/JEOL Processes (content before blanking was: "<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>200px =Large area circle arrays= Arrays of circles can naturally be exposed by exposing a pattern that consists of circles. In this scheme each circle will consist of a number of beam shots to fill the shape of each circle. For large areas this can however be very time consuming and pattern files can become very large. Hence, in this work we investigate a di...")