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• 11:47, 9 November 2023 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of Scandium Nitride/ScN Reactive RF Sputtering in Cluster Lesker PC3 (Created page with " <i>This page is written by <b>Evgeniy Shkondin @DTU Nanolab</b> if nothing else is stated. <br> All images and photos on this page belongs to <b>DTU Nanolab</b>.<br> The fabrication and characterization described below were conducted in <b>2022 by Evgeniy Shkondin, DTU Nanolab</b>.<br></i> This page presents the results of Scandium Nitride deposition using <b>RF</b> Reactive Sputtering in Sputter-System Metal-Nitride (PC3) commonly known as "Cluster Lesker". The depo...")