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15:46, 4 October 2023 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of Niobium Titanium Nitride (Created page with "This page is written by Evgeniy Shkondin @DTU Nanolab if nothing else is stated. All images and photos on this page belongs to DTU Nanolab. The fabrication and characterization described below were conducted in 2022 by Evgeniy Shkondin, DTU Nanolab. This page presents the results of NbTiN deposition using pulsed DC reactive sputtering in Sputter-System Metal-Nitride(PC3), now commonly known as "Cluster Lesker". The deposition ta...")