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• 11:25, 3 February 2023 Bghe talk contribs deleted page Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4/SiN Etch (content was: "==Stripping SRN from the whole wafer surface== This recipe has not been optimized for Silicon Rich Nitride but can be used for stripping one wafer side for the nitride when an over etch in the underlaying layer is not a problem.", and the only contributor was "Bghe" (talk))