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• 14:51, 2 January 2023 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of Tungsten/DC Sputtering of W in Sputter-system Metal-Nitride (PC3) (Created page with "=W Sputtering= This page presents the results of W deposition using <b>DC sputtering</b> in Sputter-System Metal-Nitride(PC3), now commonly known as "Cluster Lesker". The deposition target is bonded <b>W</b>. Source #3 (DC/p-DC/HiPIMS) was used. The fabrication and characterization described below were conducted in <b>2022 by Evgeniy Shkondin, DTU Nanolab</b>. The prepared samples were investigated by the X-ray Reflectivity method. The focus of the study was the depos...")