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14:50, 2 January 2023 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of Tungsten/DC Sputtering of W in Sputter-System (Lesker) (Created page with "=W Sputtering= This page presents the results of W deposition using DC sputtering in Sputter-System Lesker, now commonly known as "Old Lesker". The deposition target is W. Source #3 (DC) was used. The fabrication and characterization described below were conducted in 2022 by Evgeniy Shkondin, DTU Nanolab. The prepared samples were investigated by the X-ray Reflectivity method. The focus of the study was the deposition conditions. The process re...")