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• 14:36, 23 December 2022 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of Aluminium/Al Sputtering in Cluster Lesker PC3 (Created page with "This page presents the results of Al deposition using DC sputtering in Sputter-system Metal-Nitride (PC3), now commonly known as "Cluster Lesker". The deposition target is Al 3-inch. Source #2 (DC/p-DC) was used. The fabrication and characterization described below were conducted in 2022 by Evgeniy Shkondin, DTU Nanolab. The focus of the study was the deposition conditions. The prepared samples were investigated by the X-ray Reflectivity method. The process recipe is...")