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- 19:03, 20 December 2022 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of Carbon/Deposition of C in Sputter-System Lesker (Created page with "We can deposit Carbon (C) by DC sputtering in Sputter-System (Lesker). A 2-inch target from gun 1 (DC) is used in the process. Since the material is known to possess cross-contamination issues it was decided to cover all other guns with the protection foil. The fabrication and characterization described below were conducted in <b>2022 by Patama Pholprasit and Evgeniy Shkondin, DTU Nanolab</b>. The prepared samples were investigated by the X-ray Reflectivity (XRR), Spect...")