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• 11:24, 16 December 2022 Thope talk contribs created page Specific Process Knowledge/Lithography/EBeamLithography/FilePreparation/Pathlist (Created page with ";;*** Mask Exposure Peformance Test *** MASK00: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE CYCLIC CURRNT,DRIFT CYCLE 5M MASK01: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE CYCLIC CURRNT,DRIFT CYCLE 5M ;;*** Direct Exposure Peformance Test *** DIRE00: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE CYCLIC CURRNT CYCLE 5M DIRE01: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE CYCLIC CURR...")