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• 16:46, 14 December 2022 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of Tantalum/Ta Ebeam evaporation in Temescal (Created page with "=Deposition of Ta in Temescal= During the e-beam deposition of Tantalum, extremely bright light and heat are generated! There were some uncertainties about deposition rate and tooling factors. The reason was probably the quartz crystal that was partially shadowed by a tool frame ring. (and not incorrect tooling factor). {| border="2" cellspacing="2" cellpadding="2" colspan="3" |bgcolor="#98FB98" |'''Deposition of Tantalum. Dep. rate: 1Å/s, Thickness sp.: 50nm ''' |...")