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- 08:52, 12 August 2021 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of Silicon Oxide/Reactivly sputtered SiO2 in Sputter-System Metal Oxide (PC1) (content before blanking was: " =Reactive sputtering of SiO<sub>2</sub>= This page presents the results of SiO<sub>2</sub> deposition using <b>RF reactive sputtering</b> in Specific_Process_Knowledge/Thin_film_deposition/Cluster-based_multi-chamber_...")