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• 15:24, 28 April 2021 Bghe talk contribs deleted page Specific Process Knowledge/Etch/DRIE-Pegasus 4/Barc etch (content before blanking was: "==Barc etch with O2== ''By bghe@nanolab June 2020'' ===Sample=== *6" Si * 2µm SiO2 from C1 *90nm barc *907 nm UVN 2030-0,5 *Reticle: Pegreticle *Dose: 200 J/m2 ===Pegasus 4 settings=== *Recipe: Barc O2 *With 30 mm spacer...")