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• 10:25, 16 August 2018 Bghe talk contribs deleted page Technology Research/Fabrication of Hyperbolic Metamaterials using Atomic Layer Deposition/Procces flow (content was: "====Procces flow description==== The substrates for the samples were fabricated by depositing 1 μm of Si₃N₄ (the resonator layer) on 100 mm sili..." (and the only contributor was "Eves"))