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• 13:28, 19 September 2016 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of Aluminium/Sputter rates for Al PVD co-sputter/evaporation (content was: " == '''Sputter rates Aluminium (DC sputtering)''' == There is a general page concerning different methods of depositing Aluminium at Danchip . == '''Using PVD ...")