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• 10:37, 21 September 2009 Pvl talk contribs uploaded File:Bc 5 7 jpeg.jpg (RIE1 etch profile - 150 nm silicon nitride - recipe "BGE_NITR" (pressure 42 mTorr) - etchtime 3,5 min. The structures are made with e-beam lithography, and the Al etch mask has been removed. Wafer tiltet 45 degrees.)