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- 06:53, 30 June 2016 Bghe talk contribs deleted page Specific Process Knowledge/Etch/Etching of Silicon Oxide/SiO2 etch using RIE1 or RIE2/Images of 1SiO2mSi with p-Si mask (content was: "==This work was done on RIE1 which has been decommissioned== ===Etch of SiO2 using the recipe 1SiO2mSi with p-Si mask, by Pedro Nunes (PNU) from Nanotech@DTU=== {| border="2" cellspacing="1" cellpadding="3" align="left" !image:PNU_RIE...")