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• 09:29, 1 June 2016 Bghe talk contribs deleted page Technology Research/Fabrication of Hyperbolic Metamaterials using Atomic Layer Deposition/EMT Process development (content was: "====Procces development description==== ====Deposition of 1µm Si₃N₄ using LPCVD nitride furnace (6") E3==== Brand new 4´´ (100) Si wafers h..." (and the only contributor was "Eves"))