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- 09:25, 1 June 2016 Bghe talk contribs deleted page Technology Research/Fabrication of Hyperbolic Metamaterials using Atomic Layer Deposition (content was: "====Procces flow description==== The substrates for the samples were fabricated by depositing 1 μm of Si<sub>3</sub>N<sub>4</sub> (the resonator layer) on 100 mm sili..." (and the only contributor was "Eves"))