Specific Process Knowledge/Thin film deposition/Deposition of Nickel
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Nickel deposition
Nickel can be deposited by e-beam evaporation. In the chart below you can compare the different deposition equipment.
E-beam evaporation (Alcatel) | E-beam evaporation (Wordentec) | E-beam evaporation (PVD co-sputter/evaporation) | |
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Batch size |
|
|
|
Pre-clean | RF Ar clean | RF Ar clean | RF Ar clean |
Layer thickness | 10Å to 1µm | 10Å to 1 µm | |
Deposition rate | 2Å/s to 15Å/s | 10Å/s to 15Å/s |